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离子束轰击钨合金表面碳膜的AES和XPS分析 被引量:2
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作者 李俊 高剑 +3 位作者 张一云 吴丽萍 黄宁康 赵纯培 《四川大学学报(自然科学版)》 CAS CSCD 北大核心 2000年第3期454-458,共5页
Tungsten alloy with special properties is a useful material in medical and weapon devices.Surface modification of ion technique is used to improve the surface hardness and wear resistance of tungsten alloy,where carbo... Tungsten alloy with special properties is a useful material in medical and weapon devices.Surface modification of ion technique is used to improve the surface hardness and wear resistance of tungsten alloy,where carbon films deposited with magnetron sputtering on the surface of tungsten alloy were bombarded by ion beam with different species.AES and XPS analyses for these speciment show that tungsten carbide and tungsten nitride were formed due to N-+ bombardment.Which is beneficial to the Surface hardness and wear resistance of tungsten alloy,but no carbide or no nitride as above with other ion species.Again,ion bombardness leads to mixing between the carbon and tungsten alloy hence improve the adhere of carbon film to the substrate. 展开更多
关键词 离子束轰击 钨合金表面 碳膜 AES XPS
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