An optical fiber pressure sensor has been developed for the measurement in human body.The sensing element is possessed of a membrane structure,which is fabricated by micromachining.The fabrication process includes ani...An optical fiber pressure sensor has been developed for the measurement in human body.The sensing element is possessed of a membrane structure,which is fabricated by micromachining.The fabrication process includes anisotropic wet etching on the silicon wafer.For the transmitting source and signal light,a multimode optical fiber 50/125 μm (core/clad)in diameter was used.The intensity of the light reflected back into the fiber varies with the membrane deflection,which is s function of pressure.The deflection of the membrane by applied pressure can be mathematically described.展开更多
A new membrane type Al_2O_3 micromachining material is used.We develop an environmental multi-parameter detection micro-system,which implements the detection to temperature,humidity,wind speed,and CO.The test results ...A new membrane type Al_2O_3 micromachining material is used.We develop an environmental multi-parameter detection micro-system,which implements the detection to temperature,humidity,wind speed,and CO.The test results illustrate that the heat-release unit in micro-system intercross greatly affects other sensing units on the temperature.We study the method of etching process,which formed cavity to reduce the heat exchange efficiency and decrease temperature intercross effect.展开更多
The paper presents a new method for fabricating a gas-sensitive micro-sensor based on MEMS.The primary target agents are nitrogen dioxides (NO_2),and DIMP.Past-per-billion concentration levels of these two chemicals c...The paper presents a new method for fabricating a gas-sensitive micro-sensor based on MEMS.The primary target agents are nitrogen dioxides (NO_2),and DIMP.Past-per-billion concentration levels of these two chemicals can be detected.An interdigitated gate electrode field-effect transistor (IGEFET) has been coupled with a chemically-active and electron-beam evaporated copper phthaiocyanine (CuPc) thin film to implement a gas-sensitive micro-sensor.The sensor is excited with voltage pulse.Time and frequency-domain response were measured.The magnitude of the normalized difference Fourier transform is distinct distinguished.展开更多
Integrated gas sensor suspending bridge style micro-structure has been developed on Al_2O_3 new type membrane based on MEMS.CH_4 gas sensing unit and CO gas sensing unit were fabricated separately on 4 unit array styl...Integrated gas sensor suspending bridge style micro-structure has been developed on Al_2O_3 new type membrane based on MEMS.CH_4 gas sensing unit and CO gas sensing unit were fabricated separately on 4 unit array style suspending bridge structure.We have studied on time-sequence modulation form voltage pulse heating method which forms different work temperature展开更多
基金supported by National Science Foundation of the U.S.,under fund cite NSF 03-512supported by National‘863 Project'of China,under fund cite A05106AA5114.
文摘An optical fiber pressure sensor has been developed for the measurement in human body.The sensing element is possessed of a membrane structure,which is fabricated by micromachining.The fabrication process includes anisotropic wet etching on the silicon wafer.For the transmitting source and signal light,a multimode optical fiber 50/125 μm (core/clad)in diameter was used.The intensity of the light reflected back into the fiber varies with the membrane deflection,which is s function of pressure.The deflection of the membrane by applied pressure can be mathematically described.
文摘A new membrane type Al_2O_3 micromachining material is used.We develop an environmental multi-parameter detection micro-system,which implements the detection to temperature,humidity,wind speed,and CO.The test results illustrate that the heat-release unit in micro-system intercross greatly affects other sensing units on the temperature.We study the method of etching process,which formed cavity to reduce the heat exchange efficiency and decrease temperature intercross effect.
基金This project was supported by National Science Foundation of the U.S. under fund cite NSF 03-512. And it is supported by National Science Foundation of China+1 种基金 under fund cite NSFC 60272002. National ‘863 Project＇ of China under fund cite A05106AA5114.
文摘The paper presents a new method for fabricating a gas-sensitive micro-sensor based on MEMS.The primary target agents are nitrogen dioxides (NO_2),and DIMP.Past-per-billion concentration levels of these two chemicals can be detected.An interdigitated gate electrode field-effect transistor (IGEFET) has been coupled with a chemically-active and electron-beam evaporated copper phthaiocyanine (CuPc) thin film to implement a gas-sensitive micro-sensor.The sensor is excited with voltage pulse.Time and frequency-domain response were measured.The magnitude of the normalized difference Fourier transform is distinct distinguished.
文摘Integrated gas sensor suspending bridge style micro-structure has been developed on Al_2O_3 new type membrane based on MEMS.CH_4 gas sensing unit and CO gas sensing unit were fabricated separately on 4 unit array style suspending bridge structure.We have studied on time-sequence modulation form voltage pulse heating method which forms different work temperature
