This paper presents a flexible radio-frequency microelectromechanical system(RF MEMS)switch integrated on cyclo-olefin polymer(COP)substrate using a modified surface MEMS processing technology,which could be used in t...This paper presents a flexible radio-frequency microelectromechanical system(RF MEMS)switch integrated on cyclo-olefin polymer(COP)substrate using a modified surface MEMS processing technology,which could be used in the 17-19 GHz frequency band of satellite communication.Through systematic simulation analysis,it is found that flexible RF MEMS switch can achieve certain bending radius by miniaturizing the electronic dimension,without degrading the RF performance.It is demonstrated that the RF characteristics of flexible RF MEMS switch with special anchor structural design,fabricated by modified surface MEMS processing,are not sensitive to bending deformation under the curvature of 0 mm^(-1),0.05 mm^(-1),0.10 mm^(-1).Furthermore,the range of bending curvature which will affect the RF characteristics is given through systematic simulation.The flexible RF MEMS switch with high process compatibility and stable RF performance is believed to be promising candidates for future microwave communications and other consumer electronics.展开更多
基金supported by BOE Technology Group Co.,Ltd.Y.L.acknowledges support from the National Natural Science Foundation of China under grant numbers 61825102 and U21A20460.
文摘This paper presents a flexible radio-frequency microelectromechanical system(RF MEMS)switch integrated on cyclo-olefin polymer(COP)substrate using a modified surface MEMS processing technology,which could be used in the 17-19 GHz frequency band of satellite communication.Through systematic simulation analysis,it is found that flexible RF MEMS switch can achieve certain bending radius by miniaturizing the electronic dimension,without degrading the RF performance.It is demonstrated that the RF characteristics of flexible RF MEMS switch with special anchor structural design,fabricated by modified surface MEMS processing,are not sensitive to bending deformation under the curvature of 0 mm^(-1),0.05 mm^(-1),0.10 mm^(-1).Furthermore,the range of bending curvature which will affect the RF characteristics is given through systematic simulation.The flexible RF MEMS switch with high process compatibility and stable RF performance is believed to be promising candidates for future microwave communications and other consumer electronics.
