Surface acoustic wave(SAW)resonator with outstanding quality factors of 4829/6775 at the resonant/anti-resonant frequencies has been demonstrated on C-doped semi-insulating bulk GaN.The impact of device parameters inc...Surface acoustic wave(SAW)resonator with outstanding quality factors of 4829/6775 at the resonant/anti-resonant frequencies has been demonstrated on C-doped semi-insulating bulk GaN.The impact of device parameters including aspect ratio of length to width of resonators,number of interdigital transducers,and acoustic propagation direction on resonator performance have been studied.For the first time,we demonstrate wireless temperature sensing from 21.6 to 120℃ with a stable temperature coefficient of frequency of–24.3 ppm/℃ on bulk GaN-based SAW resonators.展开更多
基金The research is supported by the National Natural Sciences Foundation of China(Grant No.61974137)the One Hundred Person project of the Chinese Academy of Science.
文摘Surface acoustic wave(SAW)resonator with outstanding quality factors of 4829/6775 at the resonant/anti-resonant frequencies has been demonstrated on C-doped semi-insulating bulk GaN.The impact of device parameters including aspect ratio of length to width of resonators,number of interdigital transducers,and acoustic propagation direction on resonator performance have been studied.For the first time,we demonstrate wireless temperature sensing from 21.6 to 120℃ with a stable temperature coefficient of frequency of–24.3 ppm/℃ on bulk GaN-based SAW resonators.
