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SEM and Positron Annihilation Technology Investigation on the Defect Change with Thermal Treatment Temperature in GaP
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作者 ZHANGFujia QILi 《Semiconductor Photonics and Technology》 CAS 1997年第2期83-88,99,共7页
Defects in S doped GaP single crystal which is prepared by LEC method were observed using SEM and positron lifetime,and its change with thermal treatment temperature was measured using positron annihilation spectromet... Defects in S doped GaP single crystal which is prepared by LEC method were observed using SEM and positron lifetime,and its change with thermal treatment temperature was measured using positron annihilation spectrometer.The relationship between positron lifetime and the combination state of defects was discussed. 展开更多
关键词 DEFECTS Positron Lifetime Thermal Treatment
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