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Development of RuS_(2) for near-infrared photodetector by atomic layer deposition and post-sulfurization 被引量:2
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作者 Tatsuya Nakazawa Donghyun Kim +5 位作者 Jaehyeok Kim Yohei Kotsugi Taehoon Cheon Seung-Min Chung Soo-Hyun Kim Hyungjun Kim 《Rare Metals》 SCIE EI CAS CSCD 2022年第9期3086-3099,共14页
The chalcogenides of platinum-group metals(PGMs)have been known to be present in minerals and the intermediate products of refining.Over recent years,their applications in various fields,including catalysis,have been ... The chalcogenides of platinum-group metals(PGMs)have been known to be present in minerals and the intermediate products of refining.Over recent years,their applications in various fields,including catalysis,have been explored.Given that certain PGM chalcogenides behave as compound semiconductors,they can be used as materials for photodetectors.In this study,RuS_(2),featuring a bandgap suitable for near-infrared photodetectors,was prepared by forming Ru on a SiO_(2)/Si substrate via the atomic layer deposition method using[Ru(TMM)(CO)_(3)]as the precursor.Annealing was conducted at 800℃ for 1 h under H_(2)S flow.High-resolution transmission electron microscopy(HRTEM)and X-ray diffraction(XRD)analysis clearly confirmed that the as-deposited hexagonal close-packed(hcp)Ru transformed to cubic RuS_(2) after post-annealing.The surface morphologies,chemical states,and electrical and optical properties of RuS_(2) were investigated.The influence of the metallic Ru surface morphology prior to sulfurization on the reaction between Ru and H_(2)S was also discussed.To evaluate the potential of using RuS_(2) as a photodetector,a photodetector was fabricated by forming electrodes on RuS_(2) to measure its photocurrent under near-infrared light.Thus,RuS_(2) was proven to exhibit a short response time(59μs)and generate a photocurrent of 84 nA under near-infrared light at 940 nm. 展开更多
关键词 RuS_(2) SULFURIZATION Atomic layer deposition PHOTODETECTOR
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