Thin-film periodically poled lithium niobate(TF-PPLN)devices have recently gained prominence for efficient wavelength conversion processes in both classical and quantum applications.However,the patterning and poling o...Thin-film periodically poled lithium niobate(TF-PPLN)devices have recently gained prominence for efficient wavelength conversion processes in both classical and quantum applications.However,the patterning and poling of TF-PPLN devices today are mostly performed at chip scales,presenting a significant bottleneck for future largescale nonlinear photonic systems that require the integration of multiple nonlinear components with consistent performance and low cost.Here,we take a pivotal step towards this goal by developing a wafer-scale TF-PPLN nonlinear photonic platform,leveraging ultraviolet stepper lithography and an automated poling process.To address the inhomogeneous broadening of the quasi-phase matching(QPM)spectrum induced by film thickness variations across the wafer,we propose and demonstrate segmented thermal optic tuning modules that can precisely adjust and align the QPM peak wavelengths in each section.Using the segmented micro-heaters,we show the successful realignment of inhomogeneously broadened multi-peak QPM spectra with up to 57%enhancement of conversion efficiency.We achieve a high normalized conversion efficiency of 3802%W-1cm-2in a 6 mm long PPLN waveguide,recovering 84%of the theoretically predicted efficiency in this device.The advanced fabrication techniques and segmented tuning architectures presented herein pave the way for wafer-scale integration of complex functional nonlinear photonic circuits with applications in quantum information processing,precision sensing and metrology,and low-noise-figure optical signal amplification.展开更多
基金Research Grants Council,University Grants Committee(CityU 11204820,N_CityU113/20)Croucher Foundation(9509005)+1 种基金University Grants Committee(PF18-17958)National Natural Science Foundation of China(62105374)。
文摘Thin-film periodically poled lithium niobate(TF-PPLN)devices have recently gained prominence for efficient wavelength conversion processes in both classical and quantum applications.However,the patterning and poling of TF-PPLN devices today are mostly performed at chip scales,presenting a significant bottleneck for future largescale nonlinear photonic systems that require the integration of multiple nonlinear components with consistent performance and low cost.Here,we take a pivotal step towards this goal by developing a wafer-scale TF-PPLN nonlinear photonic platform,leveraging ultraviolet stepper lithography and an automated poling process.To address the inhomogeneous broadening of the quasi-phase matching(QPM)spectrum induced by film thickness variations across the wafer,we propose and demonstrate segmented thermal optic tuning modules that can precisely adjust and align the QPM peak wavelengths in each section.Using the segmented micro-heaters,we show the successful realignment of inhomogeneously broadened multi-peak QPM spectra with up to 57%enhancement of conversion efficiency.We achieve a high normalized conversion efficiency of 3802%W-1cm-2in a 6 mm long PPLN waveguide,recovering 84%of the theoretically predicted efficiency in this device.The advanced fabrication techniques and segmented tuning architectures presented herein pave the way for wafer-scale integration of complex functional nonlinear photonic circuits with applications in quantum information processing,precision sensing and metrology,and low-noise-figure optical signal amplification.
