Two-dimensional(2D)transition metal dichalcogenides(TMDs)are considered to be promising building blocks for the next generation electronic and optoelectronic devices.Various doping schemes and work function engineerin...Two-dimensional(2D)transition metal dichalcogenides(TMDs)are considered to be promising building blocks for the next generation electronic and optoelectronic devices.Various doping schemes and work function engineering techniques have been explored to overcome the intrinsic performance limits of 2D TMDs.However,a reliable and long-time air stable doping scheme is still lacking in this field.In this work,we utilize keV ion beams of H2+to irradiate layered WSe2 crystals and obtain efficient n-type doping effect for all irradiated crystals within a fluence of 1×1014 protons·cm−2(1e14).Moreover,the irradiated WSe2 remains an n-type semiconductor even after it is exposed to ambient conditions for a year.Localized ion irradiation with a focused beam can directly pattern on the sample to make high performance homogenous p-n junction diodes.Raman and photoluminescence(PL)spectra demonstrate that the WSe2 crystal lattice stays intact after irradiation within 1e14.We attribute the reliable electrondoping to the significant increase in Se vacancies after the proton irradiation,which is confirmed by our scanning transmission electron microscope(STEM)results.Our work demonstrates a reliable and long-term air stable n-type doping scheme to realize high-performance electronic TMD devices,which is also suitable for further integration with other 2D devices.展开更多
基金The authors acknowledge financial support from NRF CRP on Oxide Electronics on Silicon Beyond Moore(NRF-CRP15-2015-01)the National Natural Science Foundation of China(Nos.U2032147,21872100,and 62004128)+2 种基金Singapore MOE Grant T2EP50220-0001,MOE AcRF Tier 1 Startup grant R-284-000-179-133the Science and Engineering Research Council of A*STAR(Agency for Science,Technology and Research)Singapore,under Grant No.A20G9b0135the Fundamental Research Foundation of Shenzhen(No.JCYJ20190808152607389).
文摘Two-dimensional(2D)transition metal dichalcogenides(TMDs)are considered to be promising building blocks for the next generation electronic and optoelectronic devices.Various doping schemes and work function engineering techniques have been explored to overcome the intrinsic performance limits of 2D TMDs.However,a reliable and long-time air stable doping scheme is still lacking in this field.In this work,we utilize keV ion beams of H2+to irradiate layered WSe2 crystals and obtain efficient n-type doping effect for all irradiated crystals within a fluence of 1×1014 protons·cm−2(1e14).Moreover,the irradiated WSe2 remains an n-type semiconductor even after it is exposed to ambient conditions for a year.Localized ion irradiation with a focused beam can directly pattern on the sample to make high performance homogenous p-n junction diodes.Raman and photoluminescence(PL)spectra demonstrate that the WSe2 crystal lattice stays intact after irradiation within 1e14.We attribute the reliable electrondoping to the significant increase in Se vacancies after the proton irradiation,which is confirmed by our scanning transmission electron microscope(STEM)results.Our work demonstrates a reliable and long-term air stable n-type doping scheme to realize high-performance electronic TMD devices,which is also suitable for further integration with other 2D devices.
