The influence of working pressure on microstructure and residual stress evolution of magnetron sputtered ZrN coatings were systemically investigated.XPS and XRD results reveal that all as-deposited coatings at varying...The influence of working pressure on microstructure and residual stress evolution of magnetron sputtered ZrN coatings were systemically investigated.XPS and XRD results reveal that all as-deposited coatings at varying working pressure are stoichiometric ZrN with cubic NaCl structure.A decrease in working pressure results in preferred orientation evolution from(111)to(200).This evolution is driven by kinetics processes,such as adatom surface migration and competitive grain growth,rather than by thermodynamic.This explanation is also supported by morphology characterization as the surface and cross-section morphologies transition from tapered shape and columnar structure to round and non-columnar(equiaxed)structure.展开更多
基金National Key Technology R&D Program of China(2007BAE05B04)the National Natural Science Foundation of China(50825101)
文摘The influence of working pressure on microstructure and residual stress evolution of magnetron sputtered ZrN coatings were systemically investigated.XPS and XRD results reveal that all as-deposited coatings at varying working pressure are stoichiometric ZrN with cubic NaCl structure.A decrease in working pressure results in preferred orientation evolution from(111)to(200).This evolution is driven by kinetics processes,such as adatom surface migration and competitive grain growth,rather than by thermodynamic.This explanation is also supported by morphology characterization as the surface and cross-section morphologies transition from tapered shape and columnar structure to round and non-columnar(equiaxed)structure.
