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Wafer-scale engineering of two-dimensional transition metal dichalcogenides 被引量:3
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作者 Xiang Lan Yingliang Cheng +1 位作者 Xiangdong Yang Zhengwei Zhang 《Chip》 2023年第3期53-66,共14页
Moore’s Law has been the driving force behind the semiconductor in-dustry for several decades,but as silicon-based transistors approach their physical limits,researchers are searching for new materials to sustain thi... Moore’s Law has been the driving force behind the semiconductor in-dustry for several decades,but as silicon-based transistors approach their physical limits,researchers are searching for new materials to sustain this exponential growth.Two-dimensional transition metal dichalcogenides(TMDs),with their atomically thin structure and en-ticing physical properties,have emerged as the most promising can-didates for downsizing and improving device integration.Embold-ened by the direction of achieving large-area and high-quality TMDs growth,wafer-scale TMDs growth strategies have been continuously developed,suggesting that TMDs are poised to become a new plat-form for next-generation electronic devices.In this review,advanced synthesis routes and inherent properties of wafer-scale TMDs were critically assessed.In addition,the performance in electronic devices was also discussed,providing an outlook on the opportunities and challenges that lie ahead in their development. 展开更多
关键词 Wafer-scale Fabrication technology Transition metal dichalcogenides Electronic devices
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