Based on Hartmann-Shack sensor technique, an online thin film stress measuring system was introduced to measure the film stresses of TiO2 and SiO2, and comparison was made between the film stresses prepared respective...Based on Hartmann-Shack sensor technique, an online thin film stress measuring system was introduced to measure the film stresses of TiO2 and SiO2, and comparison was made between the film stresses prepared respectively by the conventional process and the ion-beam assisted deposition. The effect of ion-beam assisted deposition on the film stresses of TiO2 and SiO2 was investigated in details, and the stress control methodologies using on-line adjustment and film doping were put forward. The results show that the film stress value of TiO2 prepared by ion-beam assisted deposition is 40 MPa lower than that prepared by conventional process, and the stress of TiO2 film changes gradually from tensile stress into compressive stress with increasing ion energy; while the film stress of SiO2 is a tensile stress under ion-beam assisted deposition because of the ion-beam sputtering effect, and the film refractive index decreases with increasing ion energy. A dynamic film stress control can be achieved through in-situ adjustment of the processing parameters based on the online film stress measuring technique, and the intrinsic stress of film can be effectively changed through film doping.展开更多
We report the terahertz （THz） wave generation from a single-color scheme modulated by pre-ionized air plasma via an orthogonal pumping geometry. It is found that the amplitude of the THz signal generated by the pump...We report the terahertz （THz） wave generation from a single-color scheme modulated by pre-ionized air plasma via an orthogonal pumping geometry. It is found that the amplitude of the THz signal generated by the pump beam tends to decrease gradually with the increase of the modulation power. We believe that the ponderomotive force plays an important role in the process of the interaction between the pump beam and the pre-ionization beam. The hydrostatic state of the electrostatic separation field caused by the modulation beam will directly affect the generation efficiency of the THz wave. Our results contribute to further understanding of the theoretical mechanism and expanding of the practical applications of THz wave generation and modulation.展开更多
文摘Based on Hartmann-Shack sensor technique, an online thin film stress measuring system was introduced to measure the film stresses of TiO2 and SiO2, and comparison was made between the film stresses prepared respectively by the conventional process and the ion-beam assisted deposition. The effect of ion-beam assisted deposition on the film stresses of TiO2 and SiO2 was investigated in details, and the stress control methodologies using on-line adjustment and film doping were put forward. The results show that the film stress value of TiO2 prepared by ion-beam assisted deposition is 40 MPa lower than that prepared by conventional process, and the stress of TiO2 film changes gradually from tensile stress into compressive stress with increasing ion energy; while the film stress of SiO2 is a tensile stress under ion-beam assisted deposition because of the ion-beam sputtering effect, and the film refractive index decreases with increasing ion energy. A dynamic film stress control can be achieved through in-situ adjustment of the processing parameters based on the online film stress measuring technique, and the intrinsic stress of film can be effectively changed through film doping.
基金funded by the National Natural Science Foundation of China(No.61377109)the National Keystone Basic Research Program(973 Program)(No.2014CB339806)
文摘We report the terahertz （THz） wave generation from a single-color scheme modulated by pre-ionized air plasma via an orthogonal pumping geometry. It is found that the amplitude of the THz signal generated by the pump beam tends to decrease gradually with the increase of the modulation power. We believe that the ponderomotive force plays an important role in the process of the interaction between the pump beam and the pre-ionization beam. The hydrostatic state of the electrostatic separation field caused by the modulation beam will directly affect the generation efficiency of the THz wave. Our results contribute to further understanding of the theoretical mechanism and expanding of the practical applications of THz wave generation and modulation.
