Tailoring MXene Thickness and Functionalization for Enhanced Room‑Temperature Trace NO_(2) Sensing

In this study,precise control over the thickness and termination of Ti3C2TX MXene flakes is achieved to enhance their electrical properties,environmental stability,and gas-sensing performance.Utilizing a hybrid method involving high-pressure processing,stirring,and immiscible solutions,sub-100 nm MXene flake thickness is achieved within the MXene film on the Si-wafer.Functionalization control is achieved by defunctionalizing MXene at 650℃ under vacuum and H2 gas in a CVD furnace,followed by refunctionalization with iodine and bromine vaporization from a bubbler attached to the CVD.Notably,the introduction of iodine,which has a larger atomic size,lower electronegativity,reduce shielding effect,and lower hydrophilicity(contact angle:99°),profoundly affecting MXene.It improves the surface area(36.2 cm^(2) g^(-1)),oxidation stability in aqueous/ambient environments(21 days/80 days),and film conductivity(749 S m^(-1)).Additionally,it significantly enhances the gas-sensing performance,including the sensitivity(0.1119Ωppm^(-1)),response(0.2% and 23%to 50 ppb and 200 ppm NO_(2)),and response/recovery times(90/100 s).The reduced shielding effect of the–I-terminals and the metallic characteristics of MXene enhance the selectivity of I-MXene toward NO2.This approach paves the way for the development of stable and high-performance gas-sensing two-dimensional materials with promising prospects for future studies.

Retraction control of motorized seat belt system with linear state observer

A design and verification of linear state observers which estimate state information such as angular velocity and load torque for retraction control of the motorized seat belt (MSB) system were described. The motorized seat belt system provides functions to protect passengers and improve passenger's convenience. Each MSB function has its own required belt tension which is determined by the function's purpose. To realize the MSB functions, state information, such as seat belt winding velocity and seat belt tension are required. Using a linear state observer, the state information for MSB operations can be estimated without sensors. To design the linear state observer, the motorized seat belt system is analyzed and represented as a state space model which contains load torque as an augmented state. Based on the state space model, a linear state observer was designed and verified by experiments. Also, the retraction control of the MSB algorithm using linear state observer was designed and verified on the test bench. With the designed retraction control algorithm using the linear state observer, it is possible to realize various types of MSB functions.

Nonlinear State Feedback Control of PEM Fuel Cell Systems

In this paper, the nonlinear state feedback controller has been developed to control the pressures of the oxygen and the hydrogen in the PEM（Proton Exchange Membrane） fuel cell system. Nonlinear model of the PEM fuel cell system was introduced to study the design problems of the state observer and model based controller. A cascade observer using the filtering technique was used to estimate the pressure derivatives of the cathode and the anode in the system. In order to estimate the pressures of the cathode and the anode, the sliding mode observer was designed by using these pressure derivatives. To estimate the oxygen pressure and the hydrogen pressure in the system, the nonlinear state observer was designed by using the cathode pressure estimates and the anode it. These results will be very useful to design the state feedback controller. The validity of the proposed observers and the controller has been investigated by using a Lyapunov＇s stability analysis strategy.

Robot Vision System for Coordinate Measurement of Feature Points on Large Scale Automobile Part

In this paper,we present a robot vision based system for coordinate measurement of feature points on large scale automobile parts.Our system consists of an industrial 6-DOF robot mounted with a CCD camera and a PC.The system controls the robot into the area of feature points.The images of measuring feature points are acquired by the camera mounted on the robot.3D positions of the feature points are obtained from a model based pose estimation that applies to the images.The measured positions of all feature points are then transformed to the reference coordinate of feature points whose positions are obtained from the coordinate measuring machine（CMM）.Finally,the point-to-point distances between the measured feature points and the reference feature points are calculated and reported.The results show that the root mean square error（RMSE） of measure values obtained by our system is less than 0.5 mm.Our system is adequate for automobile assembly and can perform faster than conventional methods.

Etching characteristics of thin SiON films using a liquefied perfluorocarbon precursor of C_6F_(12)O with a low global warming potential

Perfluorocarbon gas is widely used in the semiconductor industry.However,perfluorocarbon has a negative effect on the global environment owing to its high global warming potential(GWP) value.An alternative solution is essential.Therefore,we evaluated the possibility of replacing conventional perfluorocarbon etching gases such as CHF_3 with C_6F_(12)O,which has a low GWP and is in a liquid state at room temperature.In this study,silicon oxynitride(SiON) films were plasma-etched using inductively coupled CF4+C_6F_(12)O+O_2 mixed plasmas.Subsequently,the etching characteristics of the film,such as etching rate,etching profile,selectivity over Si,and photoresist,were investigated.A double Langmuir probe was used and optical emission spectroscopy was performed for plasma diagnostics.In addition,a contact angle goniometer and x-ray photoelectron spectroscope were used to confirm the change in the surface properties of the etched SiON film surface.Consequently,the etching characteristics of the C_6F_(12)O mixed plasma exhibited a lower etching rate,higher SiON/Si selectivity,lower plasma damage,and more vertical etched profiles than the conventional CHF_3 mixed plasma.In addition,the C_6F_(12)O gas can be recovered in the liquid state,thereby decreasing global warming.These results confirmed that the C_6F_(12)O precursor can sufficiently replace the conventional etching gas.

A High Speed Autofocusing System for Micro System Applications

In this paper,we present a high speed autofocus system for micro system applications and design a look-up-table based autofocusing algorithm for applications when a target object is always visible,e.g.,manufacturing parts with alignment fiducials.We perform an evaluation of 24 focus measures to verify that which focus measure is the best for the look-up-table based method.From the evaluation,we find that the Chebyshev moments-based focus measure（CHEB） is the most suitable.Furthermore,we also develop a look-up-table based autofocus system that uses CHEB as the focus measure.In training phase,we offline construct a table from training images of an object that are captured at several lens distances.Each entry of table consists of focus measure computed from image and lens distance.In working phase,given an input image,the algorithm first computes the focus measure and then finds the best match focus measure from the table and looks up the corresponding lens position for moving it into the in-focus position.Our algorithm can perform autofocusing within only 2 steps of lens moving.The experiment shows that the system can perform high speed autofocusing of micro objects.

基于自解耦三明治结构的横向运动栅场效应晶体管MEMS微力传感器

本文介绍了一种基于横向可移动栅极场效应晶体管(LMGFET)的新型微型力传感器的开发。提出了一种精确的电气模型,用于小型LMGFET器件的性能评估,与以前的模型相比,其精度有所提高。采用了一种新型三明治结构,该结构由一个金交叉解耦栅阵列层和两个软光阻层SU-8组成。通过所提出的双差分传感结构,LMGFET横向工作在垂直干扰下的输出电流被大大消除,所提出传感器的相对输出误差从4.53%(传统差分结构)降低到0.01%。提出了一种实用的传感器制造工艺,并对其进行了模拟。基于LMGFET的力传感器的灵敏度为4.65μA·nN^(-1),可与垂直可移动栅极场效应晶体管(VMGFET)器件相媲美,但非线性度提高了0.78%,测量范围扩大了±5.10μN。这些分析为LMGFET器件的电气和结构参数提供了全面的设计优化,并证明了所提出的传感器在生物医学显微操作应用中具有良好的力传感潜力。

Flexible and disposable paper-based gas sensor using reduced graphene oxide/chitosan composite

Nitrogen dioxide(NO_(2))is a representative toxicant in air pollution that mostly arises from the exhaust gas released by automobiles.It is related to various respiratory diseases such as pneumonia and sudden infant death syndrome.Additionally,because the toxicity of nitrogen dioxide is high in overpopulated areas(i.e.,a capital or metropolis),the development of simple,practical,and facile sensors is highly needed.This work presents a flexible and disposable paper-based NO_(2)sensor based on a reduced graphene oxide/chitosan(r GO/CS)composite.The synthesized r GO/CS composite can be easily flexed and deformed into various shapes,which are attributed to chitosan molecules that function as a dispersion and reduction agent and support material.In addition,this composite can be attached to paper owing to its adhesive property;hence it can be utilized in versatile applications in a disposable manner.By analyzing the conductive change of the r GO/CS composite when it reacts with NO_(2),we can detect nitrogen dioxide in a concentration range of 0–100 ppm with a detection limit of 1 ppm.Moreover,we performed NO_(2)detection in the exhaust gas released by automobiles using the r GO/CS composite for practical application.The results indicated that the r GO/CS composite has the potential to be used in feasible gas sensing as a facile and disposable sensor under various conditions.