A reuse fabrication module using micro electroetching as a precision machining process with a new design of a slant-form tool to remove the defective indium-tin-oxide （ITO） nanostructure from the optical polyethylen...A reuse fabrication module using micro electroetching as a precision machining process with a new design of a slant-form tool to remove the defective indium-tin-oxide （ITO） nanostructure from the optical polyethyleneterephthalate （PET） surfaces of digital paper display is presented in current studies. The low yield of ITO thin film deposition is an important factor in optoelectronic semiconductor production. The adopted precision reuse process requires only a short period of time to remove the ITO nanostructure easily and cleanly, which is based on technical and economical considerations and is highly efficient. In the current experiment, a large inclined angle of the cathode and a small end radius of the anode take less time for the same amount of ITO removal. A higher feed rate of the optical PET diaphragm combines with enough electric power to drive fast micro electroetching. A small rotational diameter of the anode accompanied by a small width of the cathode corresponds to a higher removal rate for the ITO nanostructure. A pulsed direct current can improve the effect of dreg discharge and is advantageous to couple this current with the fast feed rate of the workpiece. This improvement is associated with an increase in current rating. High rotational speed of the slant-form tool can improve the effect of dregs discharge and is advantageous to associate with the fast feed rate of the workpiece （optical PET diaphragm）.展开更多
A reuse fabrication module using micro electrochemistry (MECM) with a round-ball tool to remove the defective In2O3 SnO2 thin film from the surfaces of digital paper display was presented.The etching effect improves t...A reuse fabrication module using micro electrochemistry (MECM) with a round-ball tool to remove the defective In2O3 SnO2 thin film from the surfaces of digital paper display was presented.The etching effect improves that the number of the round-balls decreases for promoting the concentration of electric power and increasing discharge space.Using a small size of the round-ball tool takes less time for the same amount of In2O3 SnO 2 layer removal since the effect of MECM is easily developed for supplying of sufficient electrochemical power.A higher feed rate of the poly ethylene terephthalate (PET) diaphragm combines with enough electric power to drive fast etching rate.A pulsed direct current can improve the effect of dreg discharge and is advantageous to couple this current with the fast feed rate of the workpiece.Through the ultra-precise etching of In2O 3 SnO2,the optoelectronic semiconductor industry can effectively reuse the defective products,reducing production costs.This precision etching process is of high efficiency and requires only a short period of time to remove the In2O3 SnO2 nanostructures.展开更多
基金supported by the National Science Council, Contract Nos. 97-2410-H-152-016 and 99-2221-E-152-001
文摘A reuse fabrication module using micro electroetching as a precision machining process with a new design of a slant-form tool to remove the defective indium-tin-oxide （ITO） nanostructure from the optical polyethyleneterephthalate （PET） surfaces of digital paper display is presented in current studies. The low yield of ITO thin film deposition is an important factor in optoelectronic semiconductor production. The adopted precision reuse process requires only a short period of time to remove the ITO nanostructure easily and cleanly, which is based on technical and economical considerations and is highly efficient. In the current experiment, a large inclined angle of the cathode and a small end radius of the anode take less time for the same amount of ITO removal. A higher feed rate of the optical PET diaphragm combines with enough electric power to drive fast micro electroetching. A small rotational diameter of the anode accompanied by a small width of the cathode corresponds to a higher removal rate for the ITO nanostructure. A pulsed direct current can improve the effect of dreg discharge and is advantageous to couple this current with the fast feed rate of the workpiece. This improvement is associated with an increase in current rating. High rotational speed of the slant-form tool can improve the effect of dregs discharge and is advantageous to associate with the fast feed rate of the workpiece （optical PET diaphragm）.
基金Project(100-2221-E-152-003)supported by National Science Council
文摘A reuse fabrication module using micro electrochemistry (MECM) with a round-ball tool to remove the defective In2O3 SnO2 thin film from the surfaces of digital paper display was presented.The etching effect improves that the number of the round-balls decreases for promoting the concentration of electric power and increasing discharge space.Using a small size of the round-ball tool takes less time for the same amount of In2O3 SnO 2 layer removal since the effect of MECM is easily developed for supplying of sufficient electrochemical power.A higher feed rate of the poly ethylene terephthalate (PET) diaphragm combines with enough electric power to drive fast etching rate.A pulsed direct current can improve the effect of dreg discharge and is advantageous to couple this current with the fast feed rate of the workpiece.Through the ultra-precise etching of In2O 3 SnO2,the optoelectronic semiconductor industry can effectively reuse the defective products,reducing production costs.This precision etching process is of high efficiency and requires only a short period of time to remove the In2O3 SnO2 nanostructures.
