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R. F. SPUTTERING OF AMORPHOUS SOFT MAGNETIC FILMS~*
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作者 刘宜华 栾开政 郭贻诚 《Chinese Science Bulletin》 SCIE EI CAS 1985年第7期889-893,共5页
I. INTRODUCTION The Co based amorphous soft magnetic films have been found to have high saturation magnetization, low coercivities, zero magnetostriction constants and high permeabilities. Amorphous magnetic films als... I. INTRODUCTION The Co based amorphous soft magnetic films have been found to have high saturation magnetization, low coercivities, zero magnetostriction constants and high permeabilities. Amorphous magnetic films also have good corrosion resistance, high resistivity and good high frequency properties. These make the amorphous films preferable to crystal Permalloy films when used as magnetic recording heads, current inductors, thin film transformers, surface acoustic wave variable delay lines, and many other thin film devices. It has become a very attractive material. 展开更多
关键词 MAGNETIZATION AMORPHOUS ATTRACTIVE recording resistivity saturation SPUTTERING boron CONSTANTS ARGON
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