Modeling and Analysis of a Micromotor with an Electrostatically Levitated Rotor

The modeling and evaluation of a prototype rotary micromotor where the annular rotor is supported electrostatically in five degrees of freedom is presented in order to study the behavior of this levitated micromotor and further optimize the device geometry. The analytical torque model is obtained based on the principle of a planar variable-capacitance electrostatic motor while the viscous damping caused by air film between the stator and rotor is derived using laminar Couette flow model. Simulation results of the closed-loop drive motor, based on the developed dynamic model after eliminating mechanical friction torque via electrostatic suspension, are presented. The effects of the high-voltage drive, required for rotation of the rotor, on overload capacity and suspension stiffness of the electrostatic bearing system are also analytically evaluated in an effort to determine allowable drive voltage and attainable rotor speed in operation. The analytical results show that maximum speed of the micromotor is limited mainly by viscous drag torque and stiffness of the bearing system. Therefore, it is expected to operate the device in vacuum so as to increase the rotor speed significantly, especially for those electrostatically levitated micromotors to be used as an angular rate micro-gyroscope.

Stable Narrow Linewidth 689 nm Diode Laser for the Second Stage Cooling and Trapping of Strontium Atoms

我们基于自我开发的 Littman 配置报导稳定的狭窄的线宽激光系统外部洞二极管激光(ECDL ) 。ECDL 的频率与 Pound-Drever-Hall 技术被稳定到一个高上好 ultralow 扩大玻璃参考洞。由二个相同系统跳动的 heterodyne，我们断定每 ECDL 的线宽被减少比 150 Hz 降低，它的频率稳定性在 1s 的一平均时间到达 4.3 x 10-14，平均长期的频率飘移是不到 0.2 Hz/s 超过 30 h 测量时间。[从作者抽象]

Orthogonally Linearly Polarized Dual Frequency Nd：YAG Lasers with Tunable Frequency Difference and Its Application in Precision Angle Measurement

线性地直角地极化了双频率 Nd : 有在激光共鸣器的二 1/4 个波浪盘子的钇铝柘榴石激光被建议。intra 洞变量 birefringence，它被这二个波浪盘子的相对旋转在激光引起内部洞，导致双频率激光的频率差别也可变。理论模型基于 theJones 矩阵被介绍，以及试验性的结果。在精确转动角度测量的这现象的潜在的申请也被讨论。

Kinematic Calibration and Forecast Error Compensation of a 2-DOF Planar Parallel Manipulator

Due to large workspace,heavy-duty and over-constrained mechanism,a small deformation is caused and the precision of the 2-DOF planar parallel manipulator is affected.The kinematic calibration cannot compensate the end-effector errors caused by the small deformation.This paper presents a method combined step kinematic calibration and linear forecast real-time error compensation in order to enhance the precision of a two degree-of-freedom(DOF) planar parallel manipulator of a hybrid machine tool.In the step kinematic calibration phase of the method,the end-effector errors caused by the errors of major constant geometrical parameters is compensated.The step kinematic calibration is based on the minimal linear combinations(MLCs) of the error parameters.All simple and feasible measurements in practice are given,and identification analysis of the set of the MLCs for each measurement is carried out.According to identification analysis results,both measurement costs and observability are considered,and a step calibration including step measurement,step identification and step error compensation is determined.The linear forecast real-time error compensation is used to compensate the end-effector errors caused by other parameters after the step kinematic calibration.Taking the advantages of the step kinematic calibration and the linear forecast real-time error compensation,a method for improving the precision of the 2-DOF planar parallel manipulator is developed.Experiment results show that the proposed method is robust and effective,so that the position errors are kept to the same order of the measurement noise.The presented method is attractive for the 2-DOF planar parallel manipulator and can be also applied to other parallel manipulators with fewer than six DOFs.

Dynamic Manipulability and Optimization of a Two DOF Parallel Mechanism

The dynamic dexterity is an important issue for manipulator design, some indices were proposed for analyzing dynamic dexterity, but they can evaluate the dynamic performance just at one pose in the workspaee of the manipulator, and can＇t be applied to dynamic design expediently. Much work has been done in the kinematic optimization, but the work in the dynamic optimization is much less. A global dynamic condition number index is proposed and applied to the dynamic optimization design the parallel manipulator. This paper deals with the dynamic manipulability and dynamic optimization of a two degree-of-freedom （DOF） parallel manipulator. The particular velocity and particular angular velocity matrices of each moving part about the part＇s pivot point are derived fi＇om the kinematic formulation of the manipulator, and the inertial force and inertial movement are obtained utilizing Newton-Euler formulation, then the inverse dynamic model of the parallel manipulator is proposed based on the virtual work principle. The general inertial ellipsoid and dynamic manipulability ellipsoid are applied to evaluate the dynamic performance of the manipulator, a global dynamic condition number index based on the condition number of general inertial matrix in the workspace is proposed, and then the link lengths of the manipulator is redesigned to optimize the dynamic manipulability by this index. The dynamic manipulability of the origin mechanism and the optimized mechanism are compared, the result shows that the optimized one is much better. The global dynamic condition number index has good effect in evaluating the dynamic dexterity of the whole workspace, and is efficient in the dynamic optimal design of the parallel manipulator.

Modeling Approach and Analysis of the Structural Parameters of an Inductively Coupled Plasma Etcher Based on a Regression Orthogonal Design

The geometry of an inductively coupled plasma （ICP） etcher is usually considered to be an important factor for determining both plasma and process uniformity over a large wafer. During the past few decades, these parameters were determined by the ＂trial and error＂ method, resulting in wastes of time and funds. In this paper, a new approach of regression orthogonal design with plasma simulation experiments is proposed to investigate the sensitivity of the structural parameters on the uniformity of plasma characteristics. The tool for simulating plasma is CFD-ACE＋, which is commercial multi-physical modeling software that has been proven to be accurate for plasma simulation. The simulated experimental results are analyzed to get a regression equation on three structural parameters. Through this equation, engineers can compute the uniformity of the electron number density rapidly without modeling by CFD-ACE＋. An optimization performed at the end produces good results.

Characteristics of Laser-Induced Surface and Bulk Damage of Large-Aperture Deuterated Potassium Dihydrogen Phosphate at 351 nm

Deuterated potassium dihydrogen phosphate damage performance at 351 nm is studied on a large-aperture laser system. Bulk and rear-surface damage are initiated under the 3ω fluences of 6.T J/cm2 and 33/cm2, and show different growth characteristics under multiple laser irradiations with the fluence of 6 J/cm2. The size and number of bulk damage keep unchanged once initiated. However, surface damage size also does not grow, while surface damage number increases linearly with laser shots. Different damage thresholds and growth behaviors suggest different formations of bulk and surface damage precursors. The cause of surface damage is supposed to be near-surface absorbing particles buried under the sol-gel coating.

DIAGNOSTICS OF FATIGUE CRACK IN ULTERIOR PLACES OF LARGER-SCALE OVERLOADED SUPPORTING SHAFT BASED ON TIME SERIES AND NEURAL NETWORKS

To improve the diagnosis accuracy and self-adaptability of fatigue crack in ulterior place of the supporting shaft, time series and neural network are attempted to be applied in research on diag-nosing the fatigue crack’s degree based on analyzing the vibration characteristics of the supporting shaft. By analyzing the characteristic parameter which is easy to be detected from the supporting shaft’s exterior, the time series model parameter which is hypersensitive to the situation of fatigue crack in ulterior place of the supporting shaft is the target input of neural network, and the fatigue crack’s degree value of supporting shaft is the output. The BP network model can be built and net-work can be trained after the structural parameters of network are selected. Furthermore, choosing the other two different group data can test the network. The test result will verify the validity of the BP network model. The result of experiment shows that the method of time series and neural network are effective to diagnose the occurrence and the development of the fatigue crack’s degree in ulterior place of the supporting shaft.

Stability and control of dynamic walking for a five-link planar biped robot with feet

During dynamic walking of biped robots, the underactuated rotating degree of freedom （DOF） emerges between the support foot and the ground, which makes the biped model hybrid and dimension-variant. This paper addresses the asymptotic orbit stability for dimension-variant hybrid systems （DVHS）. Based on the generalized Poincare map, the stability criterion for DVHS is also presented, and the result is then used to study dynamic walking for a five-link planar biped robot with feet. Time-invariant gait planning and nonlinear control strategy for dynamic walking with fiat feet is also introduced. Simulation results indicate that an asymptotically stable limit cycle of dynamic walking is achieved by the proposed method.

Tribology Performance and Adhesive Strength Evaluation of TiAlSiN Coating

Scratch test and friction test were performed to evaluate the internal and external interface behaviors of TiAlSiN coating, respectively. The critical compressive and shearing stress of coating failure during scratch test were calculated and the values are 30.84 MPa and 4.98 MPa respectively. The average friction coefficients of TiAlSiN coating against 2Cr12Ni4Mo3VNbN steel are 0.70 (sliding speed 50 m/min), 0.63 (sliding speed 100 m/min), and 0.81 (sliding speed 150 m/min). The elements diffusion was analyzed by EDS. Al and Si element of coating material diffuse to the steel disc, except Ti element. The oxidation decreases with the increase of sliding speed, but the adhesion increases with the increase of sliding speed. More Al element diffuses to the steel disc at the high sliding speed, but the diffusion of Si element keeps almost constant at different sliding speeds.

Electrical characteristics and optoelectronic properties of metal-semiconductor-metal structure with zinc oxide nanowires across Au electrodes

This paper reports on a method of assembling semiconducting ZnO nanowires onto a pair of Au electrodes to construct a metal--semiconductor metal （MSM） structure by dieleetrophoresis and studying on its electrical characteristics by using current-voltage （Ⅰ - Ⅴ） measurements. An electronic model with two back to back Sehottky diodes in series with a semiconductor of nanowires was established to study the electrical transport of the MSM structures. By fitting the measured Ⅰ - Ⅴ characteristics using the proposed model, the parameters of the Schottky contacts and the resistance of nanowires could be acquired. The photoelectric properties of the MSM structures were also investigated by analysing the measurements of the electrical transports under various light intensities. The deduced results demonstrate that ZnO nanowires and their Schottky contacts with Au electrodes both contribute to photosensitivity and the MSM structures with ZnO nanowires are potentially applicable for photonic devices.

Error analysis and distribution of the driving mechanism for large spherical radio telescope active reflector

In order to reduce the cost,3-PRS mechanism is introduced into the application of supporting theactive reflector unit of large radio telescope.The kinematic model of 3-PRS mechanism with rotationaljoint errors is derived to solve the error problem in actual engineering application.Then based on the errormodel,inverse and forward kinematics are analyzed.Because the solutions can not be analytically ex-pressed,a numerical method is applied.Afterwards,the parasitic motion errors are analyzed using searchmethod and empirical formulas of the maximum parasitic motion error are put forward.Finally,the toler-ance is distributed using empirical formulas to avoid interference between adjacent reflector units.Theanalyses provide a theoretical basis for the design and installation of large radio telescope active reflector.

Restriction of shot noise and material noise in a multilevel photochromic memory on signal-to-noise ratio

The recording density of multilevel photochromic memory is limited by the signal-to-noise ratio （SNR） of the readout signal. In this paper, shot noise and material noise are investigated through theoretical analysis of SNR. When the bandwidth of a system is less than 1MHz, the material noise takes a prominent position; when the bandwidth of the system is more than 10MHz, the shot noise becomes dominant. The thickness of recording layer can be optimized to maximize the SNR and reduce the influence of the bandwidth of the system on SNR.

Cooling and Crystallization of Trapped ^(113)Cd+ Ions for Atomic Clock

We report recent experimental progress toward a trapped ^(113)Cd+ion microwave frequency standard.With laser cooling,a large number of trapped cadmium ions are cooled to crystallization and the temperature of the ion crystal is measured to be 16±3 mK.The second order Doppler frequency shift,a main limiting factor of the atomic clock's performance,is estimated to be less than 1×10^(-16).

High Conversion Efficiency and Power Stability of 532 nm Generation from an External Frequency Doubling Cavity

We present a high-efficiency 532 nm green light conversion from an external cavity-enhanced second harmonic generation(SHG)with a periodically poled KTP crystal(PPKTP).The cavity is a bow-tie ring configuration with a unitized structure.When the impedance matching is optimized,the coupling efficiency of the fundamental is as high as 95%.Taking into account both the high power output of the second harmonic and the stability of the system,we obtain over 500 mW green passing through the output cavity mirror,corresponding to a net conversion efficiency higher than 75.2%.Under these operating conditions,the power stability is better than±0.25%during 5 h.It is the highest conversion efficiency and power stability ever produced in the bow-tie ring cavity with PPKTP for 532 nm generation.

Accuracy Analysis of Stewart Platform Based on Interval Analysis Method

A Stewart platform is introduced in thc 500 m aperture spherical radio telescope（FAST） as an accuracy adjustable mechanism for teed receivers. Accuracy analysis is the basis of accuracy design. However, a rapid and effective accuracy analysis method for parallel manipulator is still needed. In order to enhance solution efficiency, an interval analysis method（lA method） is introduced to solve the terminal error bound of the Stewart platform with detailed solution path. Taking a terminal pose of the Stewart platform in FAST as an example, the terminal error is solved by the Monte Carlo method（MC method） by 4 980 s, the stochastic mathematical method（SM method） by 0.078 s, and the IA method by 2.203 s. Compared with MC method, the terminal error by SM method leads a 20% underestimate while the IA method can envelop the real error bound of the Stewart platform. This indicates that the IA method outperforms the other two methods by providing quick calculations and enveloping the real error bound of the Stewart platform. According to the given structural error of the dimension parameters of the Stewart platform, the IA method gives a maximum position error of 19.91 mm and maximum orientation error of 0.534°, which suggests that the IA method can be used for accuracy design of the Stewart platfbnn in FAST. The 1A method presented is a rapid and effective accuracy analysis method for Stewart platform.

Inertia Match of a 3-RRR Reconfigurable Planar Parallel Manipulator

Inertia match of the parallel manipulator means the ratio of the inertial load of the parallel manipulator converted to each actuator shaft and the moment of inertia of the actuator is kept within a reasonable range. Currently there are many studies on parallel manipulators, but few mention inertia parameters and inertia match of parallel manipulators. This paper focuses on the inertia characteristics of the 3-RRR reconfigurable planar parallel manipulator. On the basis of the inverse dynamic formulations deduced with the principle of virtual work, the inertia matrix of the 3-RRR planar parallel manipulator in the actuator space is obtained in algebraic form. Then, by unifying the dimension and averaging diagonal elements of the inertia matrix, the equivalent inertia of the parallel manipulator, which is the inertial load of the parallel manipulator converted to each actuator shaft, is determined. By transforming the inertia problem of the 3-RRR parallel manipulator into that of the serial multi-bar manipulator, the practicality of the equivalent inertia deduced by inverse dynamics is demonstrated. According to the physical meaning of the inertia equation, the manipulator is divided in to three parts. Further analysis is carried out on the contribution of each part to the equivalent inertia and their distributions in the required workspace, revealing that the passive links cannot ignored in calculating the equivalent inertia of the parallel manipulator. Finally, the inertia match for the 3-RRR reconfigurable parallel manipulator under three configurations is accomplished, and reducers are selected. The equivalent inertia calculation and the inertial match results illustrate that the inertia math is a necessary step to the design of the parallel manipulator, and inertia parameters dramatically affect dynamic performances of parallel manipulators. Besides, the equivalent inertia and inertial match principles, proposed in the paper, can be widely applied in the dynamic analysis and servomotors selecting for the parallel manipulator.

Optimal Design of a Main Driving Mechanism for Servo Punch Press Based on Performance Atlases

The servomotor drive turret punch press is attracting more attentions and being developed more intensively due to the advantages of high speed,high accuracy,high flexibility,high productivity,low noise,cleaning and energy saving.To effectively improve the performance and lower the cost,it is necessary to develop new mechanisms and establish corresponding optimal design method with uniform performance indices.A new patented main driving mechanism and a new optimal design method are proposed.In the optimal design,the performance indices,i.e.,the local motion/force transmission indices ITI,OTI,good transmission workspace good transmission workspace(GTW) and the global transmission indices GTIs are defined.The non-dimensional normalization method is used to get all feasible solutions in dimensional synthesis.Thereafter,the performance atlases,which can present all possible design solutions,are depicted.As a result,the feasible solution of the mechanism with good motion/force transmission performance is obtained.And the solution can be flexibly adjusted by designer according to the practical design requirements.The proposed mechanism is original,and the presented design method provides a feasible solution to the optimal design of the main driving mechanism for servo punch press.