The contamination behavior of Langmuir probe in silane glow discharge plasma are discussed.A hot electrical probe is suggested to improve the diagnostics of SiH_(4) plasma.Results show the safe duration for reliable m...The contamination behavior of Langmuir probe in silane glow discharge plasma are discussed.A hot electrical probe is suggested to improve the diagnostics of SiH_(4) plasma.Results show the safe duration for reliable measurements of electron temperature can be as long as 40min by this method.展开更多
基金Supported by the National Natural Science Foundation of China.
文摘The contamination behavior of Langmuir probe in silane glow discharge plasma are discussed.A hot electrical probe is suggested to improve the diagnostics of SiH_(4) plasma.Results show the safe duration for reliable measurements of electron temperature can be as long as 40min by this method.
