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An imaging spectrometer employing tunable hyperchromatic microlenses 被引量:1
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作者 Phuong-Ha Cu-Nguyen Adrian Grewe +3 位作者 Patrik Feßer Andreas Seifert Stefan Sinzinger Hans Zappe 《Light(Science & Applications)》 SCIE EI CAS CSCD 2015年第1期33-41,共9页
We present the design,fabrication and characterization of hydraulically-tunable hyperchromatic lenses for two-dimensional(2D)spectrally-resolved spectral imaging.These hyperchromatic lenses,consisting of a positive di... We present the design,fabrication and characterization of hydraulically-tunable hyperchromatic lenses for two-dimensional(2D)spectrally-resolved spectral imaging.These hyperchromatic lenses,consisting of a positive diffractive lens and a tunable concave lens,are designed to have a large longitudinal chromatic dispersion and the images of different wavelengths from each other.2D objects of different wavelengths can consequently be imaged using the tunability of the lens system.Two hyperchromatic lens concepts are demonstrated and their spectral characteristics as well as their functionality in spectral imaging applications are shown. 展开更多
关键词 hyperchromatic lens imaging spectrometer tunable filter tunable lens
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Lau Effect Using LED Array for Lithography
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作者 Xinrui Cao Patrick FeBer Stefan Sinzinger 《Nanomanufacturing and Metrology》 2021年第3期165-174,共10页
Illumination with LEDs is of increasing interest in imaging and lithography.In particular,compared to lasers,LEDs are temporally and spatially incoherent,so that speckle effects can be avoided by the application of LE... Illumination with LEDs is of increasing interest in imaging and lithography.In particular,compared to lasers,LEDs are temporally and spatially incoherent,so that speckle effects can be avoided by the application of LEDs.Besides,LED arrays are qualified due to their high optical output power.However,LED arrays have not been widely used for investigating optical effects,e.g.,the Lau effect.In this paper,we propose the application of an LED array for realizing the Lau effect by taking into account the influence of the coherence properties of illumination on the Lau effect.Using spatially incoherent illumination with the LED array or a single LED,triangular distributed Lau fringes can be obtained.We apply the obtained Lau fringes in the optical lithography to produce analog structures.Compared to a single LED,the Lau fringes using the LED array have significantly higher intensities.Hence,the exposure time in the lithography process is largely reduced. 展开更多
关键词 Lau effect LED array LITHOGRAPHY Spatial coherence properties of illumination
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