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High χ polystyrene-b-polycarbonate for next generation lithography 被引量:1
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作者 Lei Wan 《Science China Chemistry》 SCIE EI CAS CSCD 2017年第6期679-680,共2页
Over the past half century,the semiconductor chips have deeply influenced our everyday life through increasingly sophisticated electronic products.The central driving force underlying the remarkable evolution in semic... Over the past half century,the semiconductor chips have deeply influenced our everyday life through increasingly sophisticated electronic products.The central driving force underlying the remarkable evolution in semiconductor industry is Moore’s Law,nowadays referring to a doubling of transistor counts per chip every 18 months.Sustaining Moore’s Law is economically beneficial;while the manufacturing cost per chip has been held constant, 展开更多
关键词 lithography High polystyrene sophisticated economically transistor deeply everyday doubling nowadays
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