Interests in the extendibility are growing after the introduction of the LPP (Laser Produced Plasma) EUV source technology in the semiconductor industry, towards higher average power and shorter wavelength, based on t...Interests in the extendibility are growing after the introduction of the LPP (Laser Produced Plasma) EUV source technology in the semiconductor industry, towards higher average power and shorter wavelength, based on the basic architecture of the established LPP EUV source technology. It is discussed in this article that the power scaling of the 13.5nm wavelength source is essentially possible by a slight increase of the driving laser power, CE (Conversion Efficiency) and EUV collection efficiency by some introduction of novel component technologies. Extension of the EUV wavelength towards BEUV (Beyond EUV), namely 6.x nm is discussed based on the general rule of the UTA (Unresolved Transition Arrays) of high Z ions, and development of multilayer mirrors in this particular wavelength region. Technical difficulties are evaluated for the extension of the LPP source technology by considering the narrower mirror bandwidth and higher melting temperature of the candidate plasma materials. Alternative approach based on the superconducting FEL is evaluated in comparison with the LPP source technology for the future solution.展开更多
We present the results of performance modeling of a diode-pumped solid-state HiLASE laser designed for use in inertial fusion energy power plants. The main amplifier concept is based on a He-gas-cooled multi-slab arch...We present the results of performance modeling of a diode-pumped solid-state HiLASE laser designed for use in inertial fusion energy power plants. The main amplifier concept is based on a He-gas-cooled multi-slab architecture similar to that employed in Mercury laser system. Our modeling quantifies the reduction of thermally induced phase aberrations and average depolarization in Yb3+:YAG slabs by a combination of helium cryogenic cooling and properly designed(doping/width) cladding materials.展开更多
文摘Interests in the extendibility are growing after the introduction of the LPP (Laser Produced Plasma) EUV source technology in the semiconductor industry, towards higher average power and shorter wavelength, based on the basic architecture of the established LPP EUV source technology. It is discussed in this article that the power scaling of the 13.5nm wavelength source is essentially possible by a slight increase of the driving laser power, CE (Conversion Efficiency) and EUV collection efficiency by some introduction of novel component technologies. Extension of the EUV wavelength towards BEUV (Beyond EUV), namely 6.x nm is discussed based on the general rule of the UTA (Unresolved Transition Arrays) of high Z ions, and development of multilayer mirrors in this particular wavelength region. Technical difficulties are evaluated for the extension of the LPP source technology by considering the narrower mirror bandwidth and higher melting temperature of the candidate plasma materials. Alternative approach based on the superconducting FEL is evaluated in comparison with the LPP source technology for the future solution.
基金the support of the Czech Republic’s Ministry of Education, Youth and Sports to the HiLASE (CZ.1.05/2.1.00/01.0027), DPSSLasers (CZ.1.07/2.3.00/ 20.0143), and Postdok (CZ.1.07/2.3.00/30.0057) projects, co-financed by the European Regional Development Fund. This research was supported by grant RVO 68407700
文摘We present the results of performance modeling of a diode-pumped solid-state HiLASE laser designed for use in inertial fusion energy power plants. The main amplifier concept is based on a He-gas-cooled multi-slab architecture similar to that employed in Mercury laser system. Our modeling quantifies the reduction of thermally induced phase aberrations and average depolarization in Yb3+:YAG slabs by a combination of helium cryogenic cooling and properly designed(doping/width) cladding materials.
