Highly conducting ZnO：Al （AZO） films are normally prepared through substrate heating and post-annealing in reducing atmosphere, which is deleterious to maintain the high transparency of films and the overall solar ...Highly conducting ZnO：Al （AZO） films are normally prepared through substrate heating and post-annealing in reducing atmosphere, which is deleterious to maintain the high transparency of films and the overall solar cell performance. Here we fabricate AZO films through one-step sputtering at room temperature using oxygen-deficient targets prepared via double crucible method. The best-performed AZO film achieves a low resistivity of 4.4 x 10-4 Ω cm, a high haze factor of 35.0%, and optimizes the efficiency of Cu （In, Ga）Se2 solar cell with a high value of 14.15%. This letter demonstrates that oxygen deficiency can induce high surface texture, conductivitw and boost solar cell performance.展开更多
基金financially supported by the National 863 Program of China(No.2011AA050505)the National Science Foundation of China(Nos.51121064 and 51125006)the Science and Technology Commission of Shanghai(No.12XD1406800)
文摘Highly conducting ZnO：Al （AZO） films are normally prepared through substrate heating and post-annealing in reducing atmosphere, which is deleterious to maintain the high transparency of films and the overall solar cell performance. Here we fabricate AZO films through one-step sputtering at room temperature using oxygen-deficient targets prepared via double crucible method. The best-performed AZO film achieves a low resistivity of 4.4 x 10-4 Ω cm, a high haze factor of 35.0%, and optimizes the efficiency of Cu （In, Ga）Se2 solar cell with a high value of 14.15%. This letter demonstrates that oxygen deficiency can induce high surface texture, conductivitw and boost solar cell performance.
