Polyimides are widely used in the MEMS and flexible electronics fields due to their combined physicochemical properties,including high thermal stability,mechanical strength,and chemical resistance values.In the past d...Polyimides are widely used in the MEMS and flexible electronics fields due to their combined physicochemical properties,including high thermal stability,mechanical strength,and chemical resistance values.In the past decade,rapid progress has been made in the microfabrication of polyimides.However,enabling technologies,such as laser-induced graphene on polyimide,photosensitive polyimide micropatterning,and 3D polyimide microstructure assembly,have not been reviewed from the perspective of polyimide microfabrication.The aims of this review are to systematically discuss polyimide microfabrication techniques,which cover flm formation,material conversion,micropatterning,3D microfabrication,and their applications.With an emphasis on polyimide-based flexible MEMS devices,we discuss the remaining technological challenges in polyimide fabrication and possible technological innovations in this field.展开更多
基金supported by the National Natural Science Foundation of China(T2121003,No.52022008,51975030)partially supported by the Bejing Municipal Natural Science Foundation(M22021).
文摘Polyimides are widely used in the MEMS and flexible electronics fields due to their combined physicochemical properties,including high thermal stability,mechanical strength,and chemical resistance values.In the past decade,rapid progress has been made in the microfabrication of polyimides.However,enabling technologies,such as laser-induced graphene on polyimide,photosensitive polyimide micropatterning,and 3D polyimide microstructure assembly,have not been reviewed from the perspective of polyimide microfabrication.The aims of this review are to systematically discuss polyimide microfabrication techniques,which cover flm formation,material conversion,micropatterning,3D microfabrication,and their applications.With an emphasis on polyimide-based flexible MEMS devices,we discuss the remaining technological challenges in polyimide fabrication and possible technological innovations in this field.
