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Method to accurate calibrate deposition rates of EUV multilayer coatings
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作者 张立超 高劲松 《Chinese Optics Letters》 SCIE EI CAS CSCD 2013年第13期151-153,共3页
Random thickness error is an important factor which effects the calibration accuracies of deposition rates for extreme ultraviolet (EUV) multilayer coatings fabricated by sputter deposition techniques. A least squar... Random thickness error is an important factor which effects the calibration accuracies of deposition rates for extreme ultraviolet (EUV) multilayer coatings fabricated by sputter deposition techniques. A least square fitting method is proposed to determine deposition rates and extract random thickness errors accurately. The validity of this method is shown by evaluating two deposition systems with control abilities of -0.1 nm and better than 0.01 nm respectively. 展开更多
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