Preparation and Electrochemical Characteristics of Three-dimensional Manganese Oxide Micro-supercapacitor Electrode

以便增加电极表面区域并且提高费用存储能力，我们学习微电镀物品制作三维的高方面比率的机械系统技术微电极的结构基于玻璃。阳极的经常的潜在的方法被采用在微电极的表面上作为 electroactive 物质扔锰氧化物。周期的 voltammetry 和经常的当前的费用分泌物方法两个都被用来电气化学的性能测试准备电极，与没有为比较的结构的一个二维的电极。试验性的结果证明那三维的电极结构能有效地提高费用存储能力。在 1.0 mA/cm2 费用分泌物密度，三维的电极显示出 17.88 mF/cm2 的一个电容，比二维的电极高七倍。

Preparation and characterization of three-dimensional micro-electrode for micro-supercapacitor based on inductively coupled plasma reactive etching technology

The capacity of supercapacitor charge storage depends on the size of the electrode surface area and the active material on the electrodes.To enhance the charge storage capacity with a reduced volume,silicon is used as the electrode material,and three-dimensional electrode structure is prepared to increase the electrode surface area on the footprint area by inductively coupled plasma reactive etching(ICP) techniques.The anodic constant current deposition method is employed to deposit manganese oxide on the electrode surface as the electroactive material.For comparison,samples without slot are prepared with a two-dimensional electrode.Scanning Electron Microscopy(SEM) and Energy Dispersive Spectroscopy(EDS) are used to characterize the surface morphology of the electrode structure and the deposited electroactive material.Electrochemical properties of the electrode are characterized by the cyclic voltammetry(CV) and the constant current charge-discharge method.Experimental results show that our approach can effectively increase the electrode surface area with more electroactive substances,and hence can increase storage capacity of the micro-supercapacitor.

Calculation of surface acoustic waves in a multilayered piezoelectric structure

The propagation properties of the surface acoustic waves（SAWs） in a ZnO-SiO2-Si multilayered piezoelectric structure are calculated by using the recursive asymptotic method.The phase velocities and the electromechanical coupling coefficients for the Rayleigh wave and the Love wave in the different ZnO-SiO2-Si structures are calculated and analyzed.The Love mode wave is found to be predominantly generated since the c-axis of the ZnO film is generally perpendicular to the substrate.In order to prove the calculated results,a Love mode SAW device based on the ZnO-SiO2-Si multilayered structure is fabricated by micromachining,and its frequency responses are detected.The experimental results are found to be mainly consistent with the calculated ones,except for the slightly larger velocities induced by the residual stresses produced in the fabrication process of the films.The deviation of the experimental results from the calculated ones is reduced by thermal annealing.

Design and process test of a novel MOEMS accelerometer based on Raman-Nath diffraction

A novel micro-opto-electro-mechanical system （MOEMS） accelerometer based on Raman-Nath diffraction is presented. It mainly consists of an FPW delay line oscillator and optical strip waveguides. The fun- damental theories and principles of the device are introduced briefly. A flexural plate-wave delay-line oscillator is designed to work as an acousto-optic （AO） shifter, which has a Klein-Cook parameter of 0.38. Single-mode optical strip waveguides of 2 μm in width and thicknesses of 0.6 μm are designed by using the effective index method for light transmission. The E^y00 mode waveguide polarizers are designed to ensure the consistency of the light polarization in the waveguides. The fabrication process, based on （100） oriented, 450-#m-thick silicon wafers is proposed in detail, and some difficulties in the process are discussed carefully. At last, a series of process tests are undertaken to solve the proposed problems. The results indicate that the proposed design and fabrication process of the device is dependable and realizable.

Development of Raman acousto-optic frequency shifter based on SAW

A Raman acousto-optic frequency shifter （AOFS） based on surface acoustic wave （SAW） is presented. It consists of a double-ended SAW resonator and optical waveguide system. The structure parameters of the SAW resonator are optimized using COM software and the optical waveguide system is designed using an effective index method. The AOFS prototype fabricated using MEMS technology is detected. The optical beat signals su- perimposed by ± 1st-order and ±2nd-order diffracted beams are detected. The frequency shift of 78.2201 MHz related to the 1 st-order diffracted beams and 156.2306 MHz related to the 2nd-order diffracted beams are obtained respectively.

The fabrication of vibration energy harvester arrays based on AlN piezoelectric film

The fabrication and measurement results of the vibration energy harvester arrays based on the piezoelectric aluminum nitride （AlN） film are presented. The structure design and fabrication process of the device are introduced. The key material, the AIN film with crystal orientation （002）, was deposited by pulsed-DC magnetron sputtering and characterized by X-ray diffraction （XRD）. The resonant frequency, power out, and the open circuit voltage of the device are detected. The optimized load of 80 kΩ and a remarkable maximum power out of 30.4 μW are obtained when the acceleration of 0.9g （g is standard gravity acceleration） is applied. Key words： A1N; crystal orientation; harvester arrays; vibration energy

Theoretical analysis and concept demonstration of a novel MOEMS accelerometer based on Raman-Nath diffraction

The design and simulation of a novel microoptoelectromechanical system （MOEMS） accelerometer based on Raman-Nath diffraction are presented. The device is planned to be fabricated by microelectromechanical system technology and has a different sensing principle than the other reported MOEMS accelerometers. The fun- damental theories and principles of the device are discussed in detail, a 3D finite element simulation of the flexural plate wave delay line oscillator is provided, and the operation frequency around 40 MHz is calculated. Finally, a lecture experiment is performed to demonstrate the feasibility of the device. This novel accelerometer is proposed to have the advantages of high sensitivity and anti-radiation, and has great potential for various applications.