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Growth and characterization of AlN epilayers using pulsed metal organic chemical vapor deposition
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作者 吉泽生 汪连山 +5 位作者 赵桂娟 孟钰淋 李方政 李辉杰 杨少延 王占国 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第7期420-425,共6页
We report the growth of Al N epilayers on c-plane sapphire substrates by pulsed metal organic chemical vapor deposition(MOCVD). The sources of trimethylaluminium(TMAl) and ammonia were pulse introduced into the re... We report the growth of Al N epilayers on c-plane sapphire substrates by pulsed metal organic chemical vapor deposition(MOCVD). The sources of trimethylaluminium(TMAl) and ammonia were pulse introduced into the reactor to avoid the occurrence of the parasitic reaction. Through adjusting the duty cycle ratio of TMAl to ammonia from 0.8 to 3.0, the growth rate of Al N epilayers could be controlled in the range of 0.24 m/h to 0.93 m/h. The high-resolution x-ray diffraction(HRXRD) measurement showed that the full width at half maximum(FWHM) of the(0002) and(10-12) reflections for a sample would be 194 arcsec and 421 arcsec, respectively. The step-flow growth mode was observed in the sample with the atomic level flat surface steps, in which a root-mean-square(RMS) roughness was lower to 0.2 nm as tested by atomic force microscope(AFM). The growth process of Al N epilayers was discussed in terms of crystalline quality, surface morphology,and residual stress. 展开更多
关键词 pulsed metal organic chemical vapor deposition growth mode MORPHOLOGY crystalline quality
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Frequency and wavelength tunable optical microwave source based on a distributed Bragg reflector self-pulsation laser 被引量:1
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作者 刘扬 孙瑜 +5 位作者 孔端花 王宝军 边静 安欣 赵玲娟 王圩 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2010年第6期54-56,共3页
A frequency and wavelength tunable self-pulsation laser based on DBR laser devices is reported for the first time.This laser generates continuous tunable optical microwave in the range of 1.87-21.81 GHz with 3-dB line... A frequency and wavelength tunable self-pulsation laser based on DBR laser devices is reported for the first time.This laser generates continuous tunable optical microwave in the range of 1.87-21.81 GHz with 3-dB linewidth about 10 MHz by tuning the injection currents on the front and back gain sections,and exhibits wavelength tuning range from 1536.28 to 1538.73 nm by tuning the injection currents on the grating section. 展开更多
关键词 distributed Bragg reflector laser diode self-pulsation laser optical microwave sources quantum-well intermixing
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Ag surface plasmon enhanced double-layer antireflection coatings for GaAs solar cells 被引量:1
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作者 王彦硕 陈诺夫 +6 位作者 张兴旺 杨晓丽 白一鸣 崔敏 汪宇 陈晓锋 黄添懋 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2009年第7期19-23,共5页
Surface plasmon enhanced antireflection coatings for GaAs solar cells have been designed theoretically.The reflectance of double-layer antireflection coatings(ARCs) with different suspensions of Ag particles is calc... Surface plasmon enhanced antireflection coatings for GaAs solar cells have been designed theoretically.The reflectance of double-layer antireflection coatings(ARCs) with different suspensions of Ag particles is calcu-lated as a function of the wavelength according to the optical interference matrix and the Mie theory.The mean dielectric concept was adopted in the simulations.A significant reduction of reflectance in the spectral region from 300 to 400 nm was found to be beneficial for the design of ARCs.A new SiO2/Ag-ZnS double-layer coating with better antireflection ability can be achieved if the particle volume fraction in ZnS is 1%-2%. 展开更多
关键词 antireflection coating surface plasmon resonance GaAs solar cells
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