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Research progress in quantum key distribution
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作者 张春雪 吴丹 +3 位作者 崔鹏伟 马俊驰 王玥 安俊明 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第12期129-143,共15页
Quantum key distribution(QKD)is a sophisticated method for securing information by leveraging the principles of quantum mechanics.Its objective is to establish a confidential key between authorized partners who are co... Quantum key distribution(QKD)is a sophisticated method for securing information by leveraging the principles of quantum mechanics.Its objective is to establish a confidential key between authorized partners who are connected via both a quantum channel and a classical authentication channel.This paper presents a comprehensive overview of QKD protocols,chip-based QKD systems,quantum light sources,quantum detectors,fiber-based QKD networks,space-based QKD systems,as well as the applications and prospects of QKD technology. 展开更多
关键词 quantum key distribution(QKD) SOURCES detectors CHIP
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Temperature characterizations of silica asymmetric Mach–Zehnder interferometer chip for quantum key distribution
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作者 吴丹 李骁 +9 位作者 王亮亮 张家顺 陈巍 王玥 王红杰 李建光 尹小杰 吴远大 安俊明 宋泽国 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第1期183-189,共7页
Quantum key distribution(QKD)system based on passive silica planar lightwave circuit(PLC)asymmetric Mach–Zehnder interferometers(AMZI)is characterized with thermal stability,low loss and sufficient integration scalab... Quantum key distribution(QKD)system based on passive silica planar lightwave circuit(PLC)asymmetric Mach–Zehnder interferometers(AMZI)is characterized with thermal stability,low loss and sufficient integration scalability.However,waveguide stresses,both intrinsic and temperature-induced stresses,have significant impacts on the stable operation of the system.We have designed silica AMZI chips of 400 ps delay,with bend waveguides length equalized for both long and short arms to balance the stresses thereof.The temperature characteristics of the silica PLC AMZI chip are studied.The interference visibility at the single photon level is kept higher than 95%over a wide temperature range of 12℃.The delay time change is 0.321 ps within a temperature change of 40℃.The spectral shift is 0.0011 nm/0.1℃.Temperature-induced delay time and peak wavelength variations do not affect the interference visibility.The experiment results demonstrate the advantage of being tolerant to chip temperature fluctuations. 展开更多
关键词 quantum key distribution planar lightwave circuit temperature characterization interference visibility
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Two-step growth of β-Ga_(2)O_(3) on c-plane sapphire using MOCVD for solar-blind photodetector
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作者 Peipei Ma Jun Zheng +3 位作者 Xiangquan Liu Zhi Liu Yuhua Zuo Buwen Cheng 《Journal of Semiconductors》 EI CAS CSCD 2024年第2期51-56,共6页
In this work,a two-step metal organic chemical vapor deposition(MOCVD)method was applied for growingβ-Ga_(2)O_(3) film on c-plane sapphire.Optimized buffer layer growth temperature(T_(B))was found at 700℃ and theβ-... In this work,a two-step metal organic chemical vapor deposition(MOCVD)method was applied for growingβ-Ga_(2)O_(3) film on c-plane sapphire.Optimized buffer layer growth temperature(T_(B))was found at 700℃ and theβ-Ga_(2)O_(3) film with full width at half maximum(FWHM)of 0.66°was achieved.A metal−semiconductor−metal(MSM)solar-blind photodetector(PD)was fabricated based on theβ-Ga_(2)O_(3) film.Ultrahigh responsivity of 1422 A/W@254 nm and photo-to-dark current ratio(PDCR)of 10^(6) at 10 V bias were obtained.The detectivity of 2.5×10^(15) Jones proved that the photodetector has outstanding performance in detecting weak signals.Moreover,the photodetector exhibited superior wavelength selectivity with rejection ratio(R_(250 nm)/R_(400 nm))of 105.These results indicate that the two-step method is a promising approach for preparation of high-qualityβ-Ga_(2)O_(3)films for high-performance solar-blind photodetectors. 展开更多
关键词 MOCVD two-step growth β-Ga_(2)O_(3) solar-blind photodetector responsivity
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Structured Illumination Chip Based on Integrated Optics 被引量:1
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作者 刘勇 王辰 +3 位作者 Anastasia Nemkova 胡诗铭 李智勇 俞育德 《Chinese Physics Letters》 SCIE CAS CSCD 2016年第5期46-49,共4页
A compact structured illumination chip based on integrated optics is proposed and fabricated on a silicon-on- insulator platform. Based on the simulation of Caussian beam interference, we adopt a chirped diffraction g... A compact structured illumination chip based on integrated optics is proposed and fabricated on a silicon-on- insulator platform. Based on the simulation of Caussian beam interference, we adopt a chirped diffraction grating to achieve a specific interference pattern. The experimental results match well with the simulations. The portability and flexibility of the structured illumination chip can be increased greatly through horizontal encapsulation. High levels of integration, compared with the conventional structured illumination approach, make this chip very compact, with a footprint of only around 1 mm2. The chip has no optical lenses and can be easily combined with a microfluidic system. These properties would make the chip very suitable for portable 3D scanner and compact super-resolution microscopy applications. 展开更多
关键词 of for Structured Illumination Chip Based on Integrated Optics IS on SOI into been
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High-performance waveguide-integrated Ge/Si avalanche photodetector with small contact angle between selectively epitaxial growth Ge and Si layers 被引量:1
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作者 杜小倩 李冲 +8 位作者 黎奔 王楠 赵越 杨帆 余凯 周琳 李秀丽 成步文 薛春来 《Chinese Physics B》 SCIE EI CAS CSCD 2019年第6期223-226,共4页
Step-coupler waveguide-integrated Ge/Si avalanche photodetector(APD) is based on the vertical multimode interference(MMI), enhancing light scattering towards the Ge active region and creating mirror images of optical ... Step-coupler waveguide-integrated Ge/Si avalanche photodetector(APD) is based on the vertical multimode interference(MMI), enhancing light scattering towards the Ge active region and creating mirror images of optical modes close to the Ge layer. However, there are two ineluctable contact angels between selectively epitaxial growth Ge and Si layers and selectively epitaxial growth Si and Si substrate, which has an effect on the coupling efficiency and the absorption of the photodetector. Therefore, step-coupled Ge/Si avalanche photodetectors with different step lengths are designed and fabricated. It is found that responsivity of APDs with step-coupler-length of 3.0 μm is 0.51 A/W at-6 V, 21% higher than that of 1.5 μm, which matches well with simulation absorption. The multiplication gain factor is as high as 50, and the maximum gain-bandwidth product reaches up to 376 GHz. 展开更多
关键词 WAVEGUIDES PHOTODETECTORS WAVEGUIDE devices
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InP Based PD/EAM Integrated Photonic Switch
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作者 张云霄 廖载宜 +4 位作者 潘教青 周帆 朱洪亮 赵玲娟 王圩 《Chinese Physics Letters》 SCIE CAS CSCD 2009年第10期121-124,共4页
新紧缩的三港口的 InP 基于 PD/EAM (photo-detector/electro-absorption 调节的人) 综合 photonic 开关被报导。设备与低输入在 2.5 Gbit/s 在 20 nm 上表明双向波长变换大约 20 mW 的光力量。
关键词 INP基 光子开关 EAM 集成 波长转换 三端口 紧凑型
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Wafer.Level Testable High-Speed Silicon Microring Modulator Integrated with Grating Couplers
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作者 肖希 朱宇 +6 位作者 徐海华 周亮 胡应涛 李智勇 李运涛 俞育德 余金中 《Chinese Physics Letters》 SCIE CAS CSCD 2010年第9期107-110,共4页
一个晶片级的可试验的 silicon-on-insulator-based microring 调节的人以高调整速度,栅栏 couplers 作为 fiber-to-chip 接口到综合被表明。成本效率的制造在光结构的帮助下被认识到并且蚀刻深度图案。栅栏 couplers 和波导和一样的... 一个晶片级的可试验的 silicon-on-insulator-based microring 调节的人以高调整速度,栅栏 couplers 作为 fiber-to-chip 接口到综合被表明。成本效率的制造在光结构的帮助下被认识到并且蚀刻深度图案。栅栏 couplers 和波导和一样的平板厚度有图案、蚀刻。最后,我们获得由晶片级的光、电的大小联合大约 60 nm 和 10 Gb/s nonreturn-to-zero 调整的带宽的 3-dB。[从作者抽象] 展开更多
关键词 光栅耦合器 硅绝缘体 调制器 微环 集成 测试 蚀刻深度 结构设计
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InP-based evanescently coupled high-responsivity photodiodes with extremely low dark current density integrated diluted waveguide at 1550 nm
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作者 左玉华 曹权 +5 位作者 张云 张岭梓 郭剑川 薛春来 成步文 王启明 《Chinese Physics B》 SCIE EI CAS CSCD 2011年第1期684-688,共5页
In this paper, we have demonstrated a high performance waveguide photodiode integrated diluted waveguide serving as a fibre-to-waveguide coupler to achieve high coupling efficiency. High responsivity (〉 1 A/W), hig... In this paper, we have demonstrated a high performance waveguide photodiode integrated diluted waveguide serving as a fibre-to-waveguide coupler to achieve high coupling efficiency. High responsivity (〉 1 A/W), high saturation power (〉 45 mA) in the static state and extremely low dark current density (0.04 pA/μm2) with 3 dB bandwidth at 13.4 GHz have been achieved. 展开更多
关键词 high responsivity diluted waveguide evanescent coupling waveguide photodiode
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Modeling and analysis of silicon-on-insulator elliptical microring resonators for future high-density integrated photonic circuits
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作者 熊康 肖希 +4 位作者 胡应涛 李智勇 储涛 俞育德 余金中 《Chinese Physics B》 SCIE EI CAS CSCD 2012年第7期298-303,共6页
We propose a novel resonator containing an elliptical microring based on a silicon-on-insulator platform. Simu- lations using the three-dimensional finite-difference time-domain method show that the novel elliptical m... We propose a novel resonator containing an elliptical microring based on a silicon-on-insulator platform. Simu- lations using the three-dimensional finite-difference time-domain method show that the novel elliptical microring can efficiently enhance the mode coupling between straight bus waveguides and resonator waveguides or between adjacent resonators while preserving relatively high intrinsic quality factors with large free spectral range. The proposed resonator would be an alternative choice for future high-density integrated photonic circuits. 展开更多
关键词 elliptical microring resonator SILICON-ON-INSULATOR mode coupling intrinsic quality factor
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Monolithically Integrated Transceiver with Novel Y-Branch by Bundle Integrated Waveguide for Fibre Optic Gyroscope
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作者 王路 廖栽宜 +4 位作者 程远兵 赵玲娟 潘教青 周帆 王圩 《Chinese Physics Letters》 SCIE CAS CSCD 2007年第12期3424-3427,共4页
A novel Y-branch based monolithic transceiver with a superluminescent diode and a waveguide photodiode (Y-SDL-PD) is designed and fabricated by the method of bundle integrated waveguide (BIG) as the scheme for mon... A novel Y-branch based monolithic transceiver with a superluminescent diode and a waveguide photodiode (Y-SDL-PD) is designed and fabricated by the method of bundle integrated waveguide (BIG) as the scheme for monolithic integration and angled Y-branch as the passive bi-directional waveguide. The simulations of BIG and Y-branches show low losses and improved far-field patterns, based on the beam propagation method (BPM). The amplified spontaneous emission of the device is up to lOmW at 120mA with no threshold and saturation. Spectral characteristics of about 30nm width and less than 1dB modulation are achieved using the built-in anti- lasing ability of Y-branch. The beam divergence angles in horizontal and vertical directions are optimized to as small as 12°× 8°, resulting in good fibre coupling. 展开更多
关键词 THERMOELECTRIC half-Heusler compounds thermal conductivity
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Quantum key distribution transmitter chip based on hybrid-integration of silica and lithium niobates
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作者 李骁 王亮亮 +4 位作者 张家顺 陈巍 王玥 吴丹 安俊明 《Chinese Physics B》 SCIE EI CAS CSCD 2022年第6期415-421,共7页
A quantum key distribution transmitter chip based on hybrid-integration of silica planar light-wave circuit(PLC)and lithium niobates(LN)modulator PLC is presented.The silica part consists of a tunable directional coup... A quantum key distribution transmitter chip based on hybrid-integration of silica planar light-wave circuit(PLC)and lithium niobates(LN)modulator PLC is presented.The silica part consists of a tunable directional coupler and 400-ps delay line,and the LN part is made up of a Y-branch,with electro-optic modulators on both arms.The two parts are facet-coupled to form an asymmetric Mach-Zehnder interferometer.We successfully encode and decode four BB84 states at 156.25-MHz repetition rate.Fast phase-encoding of 0 orπis achieved,with interference fringe visibilities 78.53%and 82.68%for states|+〉and|-〉,respectively.With the aid of an extra off-chip LN intensity modulator,two time-bin states are prepared and the extinction ratios are 18.65 dB and 15.46 dB for states|0〉and|1〉,respectively. 展开更多
关键词 quantum key distribution hybrid-integration BB84
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Ship Weather Routing Based on Hybrid Genetic Algorithm Under Complicated Sea Conditions
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作者 ZHOU Peng ZHOU Zheng +1 位作者 WANG Yan WANG Hongbo 《Journal of Ocean University of China》 SCIE CAS CSCD 2023年第1期28-42,共15页
Considering the effects of increased economic globalization and global warming,developing methods for reducing shipping costs and greenhouse gas emissions in ocean transportation has become crucial.Owing to its key ro... Considering the effects of increased economic globalization and global warming,developing methods for reducing shipping costs and greenhouse gas emissions in ocean transportation has become crucial.Owing to its key role in modern navigation technology,ship weather routing is the research focus of several scholars in this field.This study presents a hybrid genetic algorithm for the design of an optimal ship route for safe transoceanic navigation under complicated sea conditions.On the basis of the basic genetic algorithm,simulated annealing algorithm is introduced to enhance its local search ability and avoid premature convergence,with the ship’s voyage time and fuel consumption as optimization goals.Then,a mathematical model of ship weather routing is developed based on the grid system.A measure of fitness calibration is proposed,which can change the selection pressure of the algorithm as the population evolves.In addition,a hybrid crossover operator is proposed to enhance the ability to find the optimal solution and accelerate the convergence speed of the algorithm.Finally,a multi-population technique is applied to improve the robustness of the algorithm using different evolutionary strategies. 展开更多
关键词 genetic algorithm simulated annealing algorithm weather routing ship speed loss
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Preface to Special Issue on Novel Semiconductor-biochemical Sensors
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作者 Zhao Li Xiangmei Lin +2 位作者 Dongxian He Yingxin Ma Yuanjing Lin 《Journal of Semiconductors》 EI CAS CSCD 2023年第2期9-10,共2页
Since 2020,the global outbreak and continued evolution of the COVID-19 pandemic have brought the concepts of nucleic acid,antigen-antibody,gene sequencing,and other biochemical testing into ordinary families.In this r... Since 2020,the global outbreak and continued evolution of the COVID-19 pandemic have brought the concepts of nucleic acid,antigen-antibody,gene sequencing,and other biochemical testing into ordinary families.In this regard,novel semiconductor-biochemical sensors that convert biochemical information into monitorable electrical and optical signals according to specific rules have become increasingly important and indispensable.These sensors deeply fuse the technical advantages of semiconductors and biochemistry,integrating interdisciplinary subjects such as molecular biology,nanomaterials,microfluidics,artificial intelligence(AI),etc.With the advantages of fast speed,high sensitivity,high integration,easy mass manufacturing,the novel technologies are the"pioneer"of biomedical information acquisition and the"heart"of modern medical diagnostic equipment.Currently,the technologies are showing a spurt of development,with new products emerging,new functions being developed,and new application scenarios being expanded.The research hotspots cover a wide range,including immediate detection,non-invasive analysis,wearable devices,on-site monitoring,etc.This issue looks at the latest advances in the novel technologies for physiological dynamic monitoring of animals/plants and rapid detection of highly pathogenic pathogens,while covering applications in agriculture,fisheries,animal husbandry,biosecurity,and wearable medicine. 展开更多
关键词 HUSBANDRY integrating expanded
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GaN based ultraviolet laser diodes
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作者 Jing Yang Degang Zhao +9 位作者 Zongshun Liu Yujie Huang Baibin Wang Xiaowei Wang Yuheng Zhang Zhenzhuo Zhang Feng Liang Lihong Duan Hai Wang Yongsheng Shi 《Journal of Semiconductors》 EI CAS CSCD 2024年第1期6-15,共10页
In the past few years,many groups have focused on the research and development of GaN-based ultraviolet laser diodes(UV LDs).Great progresses have been achieved even though many challenges exist.In this article,we ana... In the past few years,many groups have focused on the research and development of GaN-based ultraviolet laser diodes(UV LDs).Great progresses have been achieved even though many challenges exist.In this article,we analyze the challenges of developing GaN-based ultraviolet laser diodes,and the approaches to improve the performance of ultraviolet laser diode are reviewed.With these techniques,room temperature(RT)pulsed oscillation of AlGaN UVA(ultraviolet A)LD has been realized,with a lasing wavelength of 357.9 nm.Combining with the suppression of thermal effect,the high output power of 3.8 W UV LD with a lasing wavelength of 386.5 nm was also fabricated. 展开更多
关键词 DIODES LASER GAN
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Synthesis and upconversion luminescence properties of NaYF_4:Yb^(3+)/Er^(3+) microspheres 被引量:8
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作者 王国凤 秦伟平 +4 位作者 王丽丽 尉国栋 朱培芬 张代生 丁福恒 《Journal of Rare Earths》 SCIE EI CAS CSCD 2009年第3期395-398,共4页
Cubic NaYF4:Yb^3+(20%)/Er^3+(1%) microspheres were synthesized by EDTA-assisted hydrothermal method. Under 980 nm excitation, ultraviolet (^4G11/2→^4I15/2), violet (^2H9/2→^4I15/2), green (^4F7/2→^4I15/... Cubic NaYF4:Yb^3+(20%)/Er^3+(1%) microspheres were synthesized by EDTA-assisted hydrothermal method. Under 980 nm excitation, ultraviolet (^4G11/2→^4I15/2), violet (^2H9/2→^4I15/2), green (^4F7/2→^4I15/2, 2H11/2→^4I15/2, and ^4S3/2→^4I15/2), and red (^4F9/2→^4I15/2) upconversion fluorescence were observed. The number of laser photons absorbed in one upconversion excitation process, n, was determined to be 3.89, 1.61, 2.55, and 1.09 for the ultraviolet, violet, green, and red emissions, respectively. Obviously, n=3.89 indicated that a four-photon process was involved in populating the ^4G11/2 state, and n=2.55 indicated that a three-photon process was involved in populating the ^4F7/2/^2H11/2/^4S3/2 levels. For the violet and red emissions, the population of the states ^2H9/2 and ^4F9/2 separately came from three-photon and two-photon processes. The decrease of n was well explained by the mechanism of competition between linear decay and upconversion processes for the depletion of the intermediate excited states. 展开更多
关键词 NaYF4:yb^3+/Er^3+ hydrothermal method upconversion luminescence rare earths
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Deposition of ZnO Films on Freestanding CVD Thick Diamond Films 被引量:8
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作者 孙剑 白亦真 +4 位作者 杨天鹏 徐艺滨 王新胜 杜国同 吴汉华 《Chinese Physics Letters》 SCIE CAS CSCD 2006年第5期1321-1323,共3页
For ZnO/diamond structured surface acoustic wave (SAW) filters, performance is sensitively dependent on the quality of the ZnO films. In this paper, we prepare highly-oriented and fine grained polycrystalline ZnO th... For ZnO/diamond structured surface acoustic wave (SAW) filters, performance is sensitively dependent on the quality of the ZnO films. In this paper, we prepare highly-oriented and fine grained polycrystalline ZnO thin films with excellent surface smoothness on the smooth nucleation surfaces of freestanding CVD diamond films by metal organic chemical vapour deposition (MOCVD). The properties of the ZnO films are characterized by x-ray diffraction (XRD), scanning electron microscopy (SEM), and photoluminescence (PL) spectrum. The influences of the deposition conditions on the quality of ZnO films are discussed briefly. ZnO/freestanding thick-diamond-film layered SAW devices with high response frequencies are expected to be developed. 展开更多
关键词 CHEMICAL-VAPOR-DEPOSITION SI SUBSTRATE SAW FILTER PLASMA FREQUENCY MOCVD
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Application of Improved Multi-Objective Ant Colony Optimization Algorithm in Ship Weather Routing 被引量:7
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作者 ZHANG Guangyu WANG Hongbo +2 位作者 ZHAO Wei GUAN Zhiying LI Pengfei 《Journal of Ocean University of China》 SCIE CAS CSCD 2021年第1期45-55,共11页
This paper presents a novel intelligent and effective method based on an improved ant colony optimization(ACO)algorithm to solve the multi-objective ship weather routing optimization problem,considering the navigation... This paper presents a novel intelligent and effective method based on an improved ant colony optimization(ACO)algorithm to solve the multi-objective ship weather routing optimization problem,considering the navigation safety,fuel consumption,and sailing time.Here the improvement of the ACO algorithm is mainly reflected in two aspects.First,to make the classical ACO algorithm more suitable for long-distance ship weather routing and plan a smoother route,the basic parameters of the algorithm are improved,and new control factors are introduced.Second,to improve the situation of too few Pareto non-dominated solutions generated by the algorithm for solving multi-objective problems,the related operations of crossover,recombination,and mutation in the genetic algorithm are introduced in the improved ACO algorithm.The final simulation results prove the effectiveness of the improved algorithm in solving multi-objective weather routing optimization problems.In addition,the black-box model method was used to study the ship fuel consumption during a voyage;the model was constructed based on an artificial neural network.The parameters of the neural network model were refined repeatedly through the historical navigation data of the test ship,and then the trained black-box model was used to predict the future fuel consumption of the test ship.Compared with other fuel consumption calculation methods,the black-box model method showed higher accuracy and applicability. 展开更多
关键词 multi-objective optimization weather routing ACO algorithm fuel consumption
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Differentiation of Positional Isomers of Propyl Alcohols Using Filament-Induced Fluorescence 被引量:4
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作者 魏祥野 涂志伟 +2 位作者 刘畅 李贺龙 徐淮良 《Chinese Physics Letters》 SCIE CAS CSCD 2016年第5期35-38,共4页
We experimentally demonstrate the recognition of positional isomers of propyl alcohol vapor through nonlinear fluorescence induced by high-intensity femtosecond laser filaments in air. By measuring characteristic fluo... We experimentally demonstrate the recognition of positional isomers of propyl alcohol vapor through nonlinear fluorescence induced by high-intensity femtosecond laser filaments in air. By measuring characteristic fluorescence of n-propyl and isopropyl alcohol vapors produced by femtosecond filament excitation, it is found that they show identical spectra, that is, those from molecular bands of CH, C2, Nit, OH and CN, while the relative intensities are different. By comparing the ratios of the CH and C2 signals, the two propyl alcohol isomers are differentiated. The different signal intensities are ascribed to different ionization potentials of the two isomer molecules, leading to different production efficiencies of fluorescing fragments. 展开更多
关键词 of IT on in Differentiation of Positional Isomers of Propyl Alcohols Using Filament-Induced Fluorescence that from
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Preparation and Ethanol Sensing Properties of ZnO Nanofibers 被引量:5
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作者 FENG Cai-hui RUAN Sheng-ping ZHU Ling-hui LI Chao LI Wei CHEN Wei-you CHEN Li-hua ZHANG Xin-dong 《Chemical Research in Chinese Universities》 SCIE CAS CSCD 2011年第5期720-723,共4页
ZnO nanofibers with an average diameter of about 90 nm were prepared by an electrospinning method combined with a calcination process. The as-electrospun nanofibers before and after calcination were characterized by m... ZnO nanofibers with an average diameter of about 90 nm were prepared by an electrospinning method combined with a calcination process. The as-electrospun nanofibers before and after calcination were characterized by means of differential thermal analysis(DTA), thermal gravimetric analysis(TGA), X-ray diffraction(XRD) and scanning electron microscopy(SEM). The fibers after calcination at 600 °C belong to the hexagonal wurtzite structure. The sensor based on ZnO nanofibers exhibited excellent ethanol sensing properties at 206 °C such as good linear dependence in the low concentration(1―100 μL/L), high response, and good selectivity. Fast response(less than 2 s) and recovery(about 16 s) were also observed in our investigations. 展开更多
关键词 Electrospinning method ZNO NANOFIBER ETHANOL Gas sensor
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A Novel Ni/Ag/Pt Ohmic Contact to P-Type GaN for Flip-Chip Light-Emitting Diodes 被引量:5
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作者 马洪霞 韩彦军 +2 位作者 申屠伟进 张贤鹏 罗毅 《Chinese Physics Letters》 SCIE CAS CSCD 2006年第8期2299-2302,共4页
We present a high-quality Ni/Ag/Pt Ohmic contact to p-type GaN. After the sample is annealed at 500℃ in 02 ambient for 3min, a specific contact resistance as low as 2.6 × 10^-5 Ωcm^2 and an optical reflectivity... We present a high-quality Ni/Ag/Pt Ohmic contact to p-type GaN. After the sample is annealed at 500℃ in 02 ambient for 3min, a specific contact resistance as low as 2.6 × 10^-5 Ωcm^2 and an optical reflectivity of 82% at 460 nm are obtained. The Auger electron spectroscopy analysis shows that the Pt layer can improve the surface morphology and thermal reliability of the annealed Ag-based electrode, Ag plays a key role in achieving good ohmic contact due to the outdiffusion of Ga into Ag forming Ga vacancies which increase the hole concentration, while the surface contamination of p-type GaN is reduced by Ni. 展开更多
关键词 LOW-RESISTANCE OXIDIZED NI/AU MECHANISM FILMS
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