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Synthesis of carbon nanotube array using corona discharge plasma-enhanced chemical vapor deposition
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作者 LIMingwei LUYinong 《Chinese Science Bulletin》 SCIE EI CAS 2003年第6期534-537,共4页
A corona discharge plasma-enhanced chemical vapor deposition with the features of atmospheric pressure and low temperature has been developed to synthesize the carbon nanotube array. The array was synthesized from met... A corona discharge plasma-enhanced chemical vapor deposition with the features of atmospheric pressure and low temperature has been developed to synthesize the carbon nanotube array. The array was synthesized from methane and hydrogen mixture in anodic aluminum oxide template channels in that cobalt was electrodeposited at the bottom. The characterization results by the scanning elec-tron microscopy, transmission electron microscopy, energy dispersive X-ray spectroscopy and Raman spectroscopy in-dicate that the array consists of carbon nanotubes with the diameter of about 40 nm and the length of more than 4 mm, and the carbon nanotubes are mainly restrained within the channels of templates. 展开更多
关键词 电晕放电等离子体 增强化学汽相沉积 碳纳米管阵列 合成方法 阳极氧化铝模板
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