In view of the extensive increase of flexible devices and wearable electronics,the development of polymer microelectro-mechanical systems(MEMS)is becoming more and more important since their potential to meet the mult...In view of the extensive increase of flexible devices and wearable electronics,the development of polymer microelectro-mechanical systems(MEMS)is becoming more and more important since their potential to meet the multiple needs for sensing applications in flexible electronics is now clearly established.Nevertheless,polymer micromachining for MEMS applications is not yet as mature as its silicon counterpart,and innovative microfabrication techniques are still expected.We show in the present work an emerging and versatile microfabrication method to produce arbitrary organic,spatially resolved multilayer micro-structures,starting from dilute inks,and with possibly a large choice of materials.This approach consists in extending classical microfluidic pervaporation combined with MIcro-Molding In Capillaries.To illustrate the potential of this technique,bilayer polymer double-clamped resonators with integrated piezoresistive readout have been fabricated,characterized,and applied to humidity sensing.The present work opens new opportunities for the conception and integration of polymers in MEMS.展开更多
基金This work was supported by the LabEx AMADEus(ANR-10-LABX-42)the framework of IdEx Bordeaux(ANR-10-IDEX-03-02)+1 种基金that is,the Investissements d’Avenir programme of the French government managed by the Agence Nationale de la RechercheWe thank Solvay and Région Nouvelle Aquitaine for funding(project MEMSOrga).
文摘In view of the extensive increase of flexible devices and wearable electronics,the development of polymer microelectro-mechanical systems(MEMS)is becoming more and more important since their potential to meet the multiple needs for sensing applications in flexible electronics is now clearly established.Nevertheless,polymer micromachining for MEMS applications is not yet as mature as its silicon counterpart,and innovative microfabrication techniques are still expected.We show in the present work an emerging and versatile microfabrication method to produce arbitrary organic,spatially resolved multilayer micro-structures,starting from dilute inks,and with possibly a large choice of materials.This approach consists in extending classical microfluidic pervaporation combined with MIcro-Molding In Capillaries.To illustrate the potential of this technique,bilayer polymer double-clamped resonators with integrated piezoresistive readout have been fabricated,characterized,and applied to humidity sensing.The present work opens new opportunities for the conception and integration of polymers in MEMS.
