μEDM(micro-electrical discharge machining)is a process for machining conductive materials without mechanical contact;it is particularly suitable for machining hard materials.The principle consists in creating electri...μEDM(micro-electrical discharge machining)is a process for machining conductive materials without mechanical contact;it is particularly suitable for machining hard materials.The principle consists in creating electrical discharges between a micro-tool and a workpiece,both of which are immersed in a dielectric.It is a complementary process to mechanical,laser,micro-machining techniques,and even to techniques derived from silicon microtechnology(RIE,DRIE,LIGA).However,the resolution ofμEDM is limited;it depends on several electrical and physical parameters.The goal of this paper is to characterize the holes obtained by drilling usingμEDM with different micro-tool diameters(Φ=250μm;Φ=80μm;Φ=40μm;Φ=20μm)for an experimental time of t=2 h.The results obtained let us conclude that a large diameter micro-tool(Φ=250μm)leads to removing a larger amount of material(43×10^(5)μm^(3))than small diameters:Φ=80μm;Φ=40μm;Φ=20μm where the removed volume is equal to 2.6×10^(5)μm^(3);105μm^(3);0.4×10^(5)μm^(3),respectively.The electrode-tool diameter influences the maximum depth of the holes;a diameter ofΦ=250μm generates a hole where the maximum depth is 170μm while small diameters:Φ=80μm;Φ=40μm;Φ=20μm provide holes with a depth of 82μm;51μm;50μm respectively.Through these experiments,we can also conclude that the lateral gap of the holes is almost constant.It is about 40μm whatever the diameter.展开更多
文摘μEDM(micro-electrical discharge machining)is a process for machining conductive materials without mechanical contact;it is particularly suitable for machining hard materials.The principle consists in creating electrical discharges between a micro-tool and a workpiece,both of which are immersed in a dielectric.It is a complementary process to mechanical,laser,micro-machining techniques,and even to techniques derived from silicon microtechnology(RIE,DRIE,LIGA).However,the resolution ofμEDM is limited;it depends on several electrical and physical parameters.The goal of this paper is to characterize the holes obtained by drilling usingμEDM with different micro-tool diameters(Φ=250μm;Φ=80μm;Φ=40μm;Φ=20μm)for an experimental time of t=2 h.The results obtained let us conclude that a large diameter micro-tool(Φ=250μm)leads to removing a larger amount of material(43×10^(5)μm^(3))than small diameters:Φ=80μm;Φ=40μm;Φ=20μm where the removed volume is equal to 2.6×10^(5)μm^(3);105μm^(3);0.4×10^(5)μm^(3),respectively.The electrode-tool diameter influences the maximum depth of the holes;a diameter ofΦ=250μm generates a hole where the maximum depth is 170μm while small diameters:Φ=80μm;Φ=40μm;Φ=20μm provide holes with a depth of 82μm;51μm;50μm respectively.Through these experiments,we can also conclude that the lateral gap of the holes is almost constant.It is about 40μm whatever the diameter.
