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The geometric resistivity correction factor for several geometrical samples 被引量:1
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作者 Serdar Yilmaz 《Journal of Semiconductors》 EI CAS CSCD 2015年第8期1-8,共8页
This paper reviews the geometric resistivity correction factor of the 4-point probe DC electrical conduc- tivity measurement method using several geometrical samples. During the review of the literature, only the arti... This paper reviews the geometric resistivity correction factor of the 4-point probe DC electrical conduc- tivity measurement method using several geometrical samples. During the review of the literature, only the articles that include the effect of geometry on resistivity calculation were considered. Combinations of equations used for various geometries were also given. Mathematical equations were given in the text without details. Expressions for the most commonly used geometries were presented in a table for easy reference. 展开更多
关键词 semiconductor four point probe conductivity measurement resistivity correction factor
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