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Heterodyne Standing-Wave Interferometer with Improved Phase Stability 被引量:1
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作者 Ingo Ortlepp Jens-Peter Zollner +1 位作者 Ivo W.Rangelow Eberhard Manske 《Nanomanufacturing and Metrology》 2021年第3期190-199,共10页
This paper describes a standing-wave interferometer with two laser sources of different wavelengths,diametrically opposed and emitting towards each other.The resulting standing wave has an intensity profile which is m... This paper describes a standing-wave interferometer with two laser sources of different wavelengths,diametrically opposed and emitting towards each other.The resulting standing wave has an intensity profile which is moving with a constant velocity,and is directly detected inside the laser beam by two thin and transparent photo sensors.The first sensor is at a fixed position,serving as a phase reference for the second one which is moved along the optical axis,resulting in a frequency shift,proportional to the velocity.The phase difference between both sensors is evaluated for the purpose of interferometric length measurements. 展开更多
关键词 Standing wave INTERFEROMETER HETERODYNE Ultrathin photo diode
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