A high-g beam-mass structure accelerometer was designed.In this structure,by means of KOH back etching on the mass,V-groove structure was fabricated on the backside of the mass,so the weight of the mass and also the r...A high-g beam-mass structure accelerometer was designed.In this structure,by means of KOH back etching on the mass,V-groove structure was fabricated on the backside of the mass,so the weight of the mass and also the relative distance between the mass center and the neutral plane were all decreased.With the thin mass structure,we can take advantage of both beam-mass structure and flat film structure;the fabrication process is also simple.By means of Hopkinson shock test system,we did the accelerometer calibration.According to the test result,the sensitivity of the MEMS accelerometer is 0.71 μV/g,which keeps in accordance with the theoretical calculation.After a 200 000 g shocking test,the micro structure worked as usual,so this design can satisfy the requirements of high shock,seriously vibration test environment.展开更多
The structure and measurement theory of a single-axis integrated inertia measurement device are discussed in this paper.The acceleration and angle velocity can be detected by the proposed sensor at the same time.The k...The structure and measurement theory of a single-axis integrated inertia measurement device are discussed in this paper.The acceleration and angle velocity can be detected by the proposed sensor at the same time.The ki- netic model of the device is also established.In addition,the signal generation of the single-axis integrated inertia measurement device is analyzed and simulated.The results of the model are consistent with simulation result.展开更多
基金Shanxi province young leaders on science and by program for New Century Excellent Talents in University(NCET)
文摘A high-g beam-mass structure accelerometer was designed.In this structure,by means of KOH back etching on the mass,V-groove structure was fabricated on the backside of the mass,so the weight of the mass and also the relative distance between the mass center and the neutral plane were all decreased.With the thin mass structure,we can take advantage of both beam-mass structure and flat film structure;the fabrication process is also simple.By means of Hopkinson shock test system,we did the accelerometer calibration.According to the test result,the sensitivity of the MEMS accelerometer is 0.71 μV/g,which keeps in accordance with the theoretical calculation.After a 200 000 g shocking test,the micro structure worked as usual,so this design can satisfy the requirements of high shock,seriously vibration test environment.
基金Supported by Shanxi Province Young Leaders on Science and by Program for New Century Excellent Talents in University(NCET)
文摘The structure and measurement theory of a single-axis integrated inertia measurement device are discussed in this paper.The acceleration and angle velocity can be detected by the proposed sensor at the same time.The ki- netic model of the device is also established.In addition,the signal generation of the single-axis integrated inertia measurement device is analyzed and simulated.The results of the model are consistent with simulation result.
