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Third-order trajectory planning for high accuracy point-topoint motion 被引量:1
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作者 Haihua MU Yunfei ZHOU +1 位作者 Sijie YAN Aiguo HAN 《Frontiers of Electrical and Electronic Engineering in China》 CSCD 2009年第1期83-87,共5页
This article studies a third-order trajectory planning method for point-to-point motion.All available instances for third-order trajectory planning are first analyzed.To distinguish those,three criteria are presented ... This article studies a third-order trajectory planning method for point-to-point motion.All available instances for third-order trajectory planning are first analyzed.To distinguish those,three criteria are presented relying on trajectory characteristics.Following that,a fast preprocessing approach considering the trajectory as a whole is given based on the criteria constructed and system constraints.Also,the time-optimality of the trajectory is obtained.The relevant formulas are derived with the combination of geometrical symmetry of trajectory and area method.As a result,an accurate algorithm and its implementation procedure are proposed.The experimental results show the effectiveness and precision of the proposed method.The presented algorithm has been applied in semiconductor manufacturing equipment successfully. 展开更多
关键词 trajectory planning point-to-point motion limitation criteria
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