ZnO films are deposited on glass slides by radio frequency(RF) magnetron sputtering under different powers. The polycrystal structures and surface morphologies of the film are investigated. The optical transmission sp...ZnO films are deposited on glass slides by radio frequency(RF) magnetron sputtering under different powers. The polycrystal structures and surface morphologies of the film are investigated. The optical transmission spectra for the ZnO films are measured within the range from 300 nm to 800 nm. The optical constants and thickness of the films are determined using a nonlinear programming method suggested by Birgin et al. The band gap of the film increases with reducing the nano-size of the film grains. The packing density of the films can be improved by reducing the RF power.展开更多
基金the Ministry of Science and Technology of China(2002CB211807)Science and Technology Project of FujianProvince of China(2005 H043)Science and Technology Novel Project of Xiamen University(XMKJCX20051025)
文摘ZnO films are deposited on glass slides by radio frequency(RF) magnetron sputtering under different powers. The polycrystal structures and surface morphologies of the film are investigated. The optical transmission spectra for the ZnO films are measured within the range from 300 nm to 800 nm. The optical constants and thickness of the films are determined using a nonlinear programming method suggested by Birgin et al. The band gap of the film increases with reducing the nano-size of the film grains. The packing density of the films can be improved by reducing the RF power.
