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掩模制作中的邻近效应 被引量:2
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作者 杜惊雷 石瑞英 +1 位作者 崔铮 郭永康 《微纳电子技术》 CAS 2002年第11期36-40,共5页
计算模拟了激光束和电子束直写加工的掩模畸变,并分别用理想掩模和有畸变的掩模进行投影光学光刻过程的模拟和比较,讨论了光学邻近效应校正掩模在加工过程中所产生的畸变对传递到最终基片上的图形的影响。模拟分析指出,掩模加工中的邻... 计算模拟了激光束和电子束直写加工的掩模畸变,并分别用理想掩模和有畸变的掩模进行投影光学光刻过程的模拟和比较,讨论了光学邻近效应校正掩模在加工过程中所产生的畸变对传递到最终基片上的图形的影响。模拟分析指出,掩模加工中的邻近畸变应在设计光学邻近校正掩模时予以注意,即在掩模设计时,应把掩模加工中的邻近效应和光刻图形传递过程的邻近效应进行总体考虑,以便设计出最优化的掩模,获得最好的邻近效应校正效果。 展开更多
关键词 掩模制作 邻近效应 光学邻近效应 掩模畸变 光刻模拟 光学邻近校正 微光刻
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365~193nm曝光的亚半微米多晶硅栅控制
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作者 Brian Martin Graham Arthur 万力 《电子工业专用设备》 2000年第4期50-56,共7页
综述了测量越过典型有源区形貌的多晶硅栅线宽偏差 ,采用光刻模拟程序计算。采用顶层和底层抗反射涂层与否 ,对从 36 5nm曝光的 0 .40 μm到 193nm曝光的 0 .2 2 5 μm范围抗蚀剂成像中所有线宽进行了计算。
关键词 半导体 光学光刻 模拟 多晶硅 亚半微米 曝光
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Distributing File—based Data to Remote sites within the BABAR Collaboration
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作者 TimAdye AlviseDorigo 《International Conference on Computing in High Energy and Nuclear Physics》 2001年第1期284-285,共2页
BABAR[1] uses two formats for its data:Objectivity database and ROOT[1] files.This poster concerns the distribution of the latter-for Objectivity data see [3].The BABAR analysis data is stored in ROOT files-one per ph... BABAR[1] uses two formats for its data:Objectivity database and ROOT[1] files.This poster concerns the distribution of the latter-for Objectivity data see [3].The BABAR analysis data is stored in ROOT files-one per physics run and analysis selection channel-maintained in a large directory tree,Currently BABAR has more than 4.5 TBytes in 200,000 ROOT files.This data is (mostly)produced at SLAC,but is required for analysis at universities and research centres throughout the US and Europe.Two basic problems confront us when we seek to import bulk data from SLAC to an institute's local storage via the network.We must determine which files must be imported (depending on the local site requirements and which files have already been imported),and we must make the optimum use of the network when transferring the data,Basic ftp-like tools(ftp,scp,etc)do not attempt to solve the first problem.More sophisticated tools like rsync[4],the widely-used mirror/synchronisation program,compare local and remote file systems,checking for changes(based on file date,size and,if desired,an elaborate checksum)in order to only copy new or modified files,However rsync allows for only limited file selection.Also when,as in BABAR,an extremely large directory structure must be scanned,rsync can take several hours just to determine which files need to be copied.Although rsync(and scp)provides on -the=fly compression,it does not allow us to optimise the network transfer by using multiple streams,abjusting the TCP window size or separating encrypted authentication from unencrypted data channels. 展开更多
关键词 分布式数据库 BABAR实验合作 文件管理工具
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