由于硅微陀螺仪材料和加工工艺以及电路上的非理想因素,驱动信号会对敏感检测端产生串扰。为抑制此种串扰,降低驱动激励幅度,采用了基于参数激励法的陀螺驱动模态激励系统。在锁相环控制中新增一个压控振荡器模块,用于输出稳幅的二倍谐...由于硅微陀螺仪材料和加工工艺以及电路上的非理想因素,驱动信号会对敏感检测端产生串扰。为抑制此种串扰,降低驱动激励幅度,采用了基于参数激励法的陀螺驱动模态激励系统。在锁相环控制中新增一个压控振荡器模块,用于输出稳幅的二倍谐振频率激励信号,即参数激励信号。将此信号与驱动激励信号一同对驱动激励电极进行激励,达到了降低刚度系数来减小驱动对敏感电馈通干扰的目的。实验结果表明,参数激励法对陀螺仪进行激励,将陀螺仪敏感输出信号幅度从141.25 m V降至38.75 m V,Allan方差零偏不稳定性从6.864 (°)/h降至4.316 (°)/h。表明了参数激励法对陀螺仪性能具有一定的提升作用。展开更多
A novel 1-3-2 piezoelectric composite has been developed,which consists of piezoelectric ceramic plate and 1-3 piezoelectric composite.The composite was fabricated by dicing PZT ceramic along mutual perpendicular two ...A novel 1-3-2 piezoelectric composite has been developed,which consists of piezoelectric ceramic plate and 1-3 piezoelectric composite.The composite was fabricated by dicing PZT ceramic along mutual perpendicular two directions and then filling epoxy into grooves.The piezoelectric and electromechanical properties of the novel composite were determined. The results show a coefficient d_ (33) of 405pC/N,a vibration displacement of 113.5pm,an acoustic impendence of 13.3 Mraly, a bandwidth of 12kHz and a thickness electromechanical coupling coefficient of 0.56.展开更多
This paper reported a silicon micromachined gyroscope which is driven by the rotating carrier's angular velocity,the silicon was manufactured by anisotropy etching.The design,fabrication and packing of the sensing...This paper reported a silicon micromachined gyroscope which is driven by the rotating carrier's angular velocity,the silicon was manufactured by anisotropy etching.The design,fabrication and packing of the sensing element were introduced in the paper.The imitation experimentation and performance test have certificated that the principle of the gyroscope is correct and the gyroscope can be used to sense yawing or pitching angular velocity of the rotating carrier,and the angular velocity of the rotating carrier itself.展开更多
Nanofluids are a potential alternative to significantly improving the performance of heat transfer applications. In this work, a numerical analysis to examine the eff ect of dispersing copper(Cu), copper oxide(CuO), a...Nanofluids are a potential alternative to significantly improving the performance of heat transfer applications. In this work, a numerical analysis to examine the eff ect of dispersing copper(Cu), copper oxide(CuO), and aluminum(Al2O3) nanoparticles in pure water on the performance of a flat plate solar collector(FPSC) and a numerical model was proposed. The influence of the nanofluid type on the thermal efficiency was critically investigated and discussed. The eff ect of the mass flow rate on the performance was also analyzed and discussed. Based on correlations of the thermophysical properties of nanofluids, a sensitivity analysis was used to analyze the impact of the nanoparticles on the base fluid. The results indicate that the performance of the FPSC with Cu/water nanofluid was better than that of FPSCs using CuO/water or Al2O3/water nanofluids. When the mass flow rate of the nanofluids was 8.0 L/min, the efficiency of the FPSC was much greater than those at the flow rates of 5.0 L/min and 2.0 L/min. Mean enhancements in thermal efficiency of 4.44%, 4.27%, and 4.21% were observed when 2.0 L/min was applied using Cu/water, Cu O/water, and Al2O3/water nanofluids, respectively. Improvements in thermal efficiency of 2.76%, 2.53%, and 2.47% occurred when 8.0 L/min was applied.展开更多
Approaches for the fabrication of a low power-operable formaldehyde(HCHO)gas sensor with high sensitivity and selectivity were performed by the utilization of an effective micro-structured platform with a micro-heater...Approaches for the fabrication of a low power-operable formaldehyde(HCHO)gas sensor with high sensitivity and selectivity were performed by the utilization of an effective micro-structured platform with a micro-heater to reach high temperature with low heating power as well as by the integration of indium oxide(In2O3)nanofibers decorated with well-dispersed Au nanoparticles as a sensing material.Homogeneous In2O3 nanofibers with the large specific surface area were prepared by the electrospinning following by calcination process.Au nanoparticles with the well-controlled size as a catalyst were synthesized on the surface of In2O3 nanofibers.The Au-decorated In2O3 nanofibers were reliably integrated as sensing materials on the bridge-type micro-platform including micro-heaters and micro-electrodes.The micro-platform designed to maintain high temperature with low power consumption was fabricated by a microelectromechanical system(MEMS)technique.The micro-platform gas sensor consisting with Au-In2O3 nanofibers were fabricated effectively to detect HCHO gases with high sensitivity and selectivity.The HCHO gas sensing behaviors were schematically studied as a function of the gas concentration,the size of the adsorbed Au nanoparticles,the applied power to raise the temperature of a sensing part and the kind of target gases.展开更多
文摘由于硅微陀螺仪材料和加工工艺以及电路上的非理想因素,驱动信号会对敏感检测端产生串扰。为抑制此种串扰,降低驱动激励幅度,采用了基于参数激励法的陀螺驱动模态激励系统。在锁相环控制中新增一个压控振荡器模块,用于输出稳幅的二倍谐振频率激励信号,即参数激励信号。将此信号与驱动激励信号一同对驱动激励电极进行激励,达到了降低刚度系数来减小驱动对敏感电馈通干扰的目的。实验结果表明,参数激励法对陀螺仪进行激励,将陀螺仪敏感输出信号幅度从141.25 m V降至38.75 m V,Allan方差零偏不稳定性从6.864 (°)/h降至4.316 (°)/h。表明了参数激励法对陀螺仪性能具有一定的提升作用。
基金supported by the Beijing Natural Science Foundation of China(No.KZ200410772016)Academic Innovative Team Program of University in Beijing.
文摘A novel 1-3-2 piezoelectric composite has been developed,which consists of piezoelectric ceramic plate and 1-3 piezoelectric composite.The composite was fabricated by dicing PZT ceramic along mutual perpendicular two directions and then filling epoxy into grooves.The piezoelectric and electromechanical properties of the novel composite were determined. The results show a coefficient d_ (33) of 405pC/N,a vibration displacement of 113.5pm,an acoustic impendence of 13.3 Mraly, a bandwidth of 12kHz and a thickness electromechanical coupling coefficient of 0.56.
基金supported by the National Natural Science Foundation of China(No.60272001)the Beijing Natural Science Foundation of China(No.4032010).
文摘This paper reported a silicon micromachined gyroscope which is driven by the rotating carrier's angular velocity,the silicon was manufactured by anisotropy etching.The design,fabrication and packing of the sensing element were introduced in the paper.The imitation experimentation and performance test have certificated that the principle of the gyroscope is correct and the gyroscope can be used to sense yawing or pitching angular velocity of the rotating carrier,and the angular velocity of the rotating carrier itself.
文摘Nanofluids are a potential alternative to significantly improving the performance of heat transfer applications. In this work, a numerical analysis to examine the eff ect of dispersing copper(Cu), copper oxide(CuO), and aluminum(Al2O3) nanoparticles in pure water on the performance of a flat plate solar collector(FPSC) and a numerical model was proposed. The influence of the nanofluid type on the thermal efficiency was critically investigated and discussed. The eff ect of the mass flow rate on the performance was also analyzed and discussed. Based on correlations of the thermophysical properties of nanofluids, a sensitivity analysis was used to analyze the impact of the nanoparticles on the base fluid. The results indicate that the performance of the FPSC with Cu/water nanofluid was better than that of FPSCs using CuO/water or Al2O3/water nanofluids. When the mass flow rate of the nanofluids was 8.0 L/min, the efficiency of the FPSC was much greater than those at the flow rates of 5.0 L/min and 2.0 L/min. Mean enhancements in thermal efficiency of 4.44%, 4.27%, and 4.21% were observed when 2.0 L/min was applied using Cu/water, Cu O/water, and Al2O3/water nanofluids, respectively. Improvements in thermal efficiency of 2.76%, 2.53%, and 2.47% occurred when 8.0 L/min was applied.
基金supported financially by the Basic Science Research Program through the National Research Foundation of Korea(NRF)funded by the Ministry of Education(No.2017R1D1A1B03030796).
文摘Approaches for the fabrication of a low power-operable formaldehyde(HCHO)gas sensor with high sensitivity and selectivity were performed by the utilization of an effective micro-structured platform with a micro-heater to reach high temperature with low heating power as well as by the integration of indium oxide(In2O3)nanofibers decorated with well-dispersed Au nanoparticles as a sensing material.Homogeneous In2O3 nanofibers with the large specific surface area were prepared by the electrospinning following by calcination process.Au nanoparticles with the well-controlled size as a catalyst were synthesized on the surface of In2O3 nanofibers.The Au-decorated In2O3 nanofibers were reliably integrated as sensing materials on the bridge-type micro-platform including micro-heaters and micro-electrodes.The micro-platform designed to maintain high temperature with low power consumption was fabricated by a microelectromechanical system(MEMS)technique.The micro-platform gas sensor consisting with Au-In2O3 nanofibers were fabricated effectively to detect HCHO gases with high sensitivity and selectivity.The HCHO gas sensing behaviors were schematically studied as a function of the gas concentration,the size of the adsorbed Au nanoparticles,the applied power to raise the temperature of a sensing part and the kind of target gases.
