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Investigation of an a-Si/c-Si interface on a c-Si(P) substrate by simulation 被引量:1
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作者 汪建强 高华 +2 位作者 张剑 孟凡英 叶庆好 《Journal of Semiconductors》 EI CAS CSCD 2012年第3期8-14,共7页
We investigate the recombination mechanism in an a-Si/c-Si interface,and analyze the key factors that influence the interface passivation quality,such as Q_s,δ_p/δ_n and D_(it).The polarity of the dielectric film ... We investigate the recombination mechanism in an a-Si/c-Si interface,and analyze the key factors that influence the interface passivation quality,such as Q_s,δ_p/δ_n and D_(it).The polarity of the dielectric film is very important to the illustration level dependent passivation quality;when nδ_n = pδ_p and the defect level E_t equal to E_i(c-Si),the defect states are the most effective recombination center,AFORS-HET simulation and analysis indicate that emitter doping and a-Si/c-Si band offset modulation are effective in depleting or accumulating one charged carrier.Interface states(D_(it)) severely deteriorate V_(oc) compared with J_(sc) for a-Si/c-Si HJ cell performance when D_(it) is over 1×10^(10) cm^(-2)·eV^(-1).For a c-Si(P)/a-Si(P~+) structure,φ_(BSF) in c-Si andφ_0 in a-Si have different performances in optimization contact resistance and c-Si(P)/a-Si(P~+) interface recombination. 展开更多
关键词 a-Si/c-Si interface a-Si emitter property interface defect states
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