A sinusoidal phase-modulating （SPM） laser diode （LD） interferometer for real-time surface profile measurement is proposed and its principle is analyzed. The phase signal of the surface profile is detected from the...A sinusoidal phase-modulating （SPM） laser diode （LD） interferometer for real-time surface profile measurement is proposed and its principle is analyzed. The phase signal of the surface profile is detected from the sinusoidal phase-modulating interference signal using a real-time phase detection circuit. For 60 × 60 measurement points of the surface profile, the measuring time is 10 ms. A root mean square （RMS） measurement repeatability of 3.93 nm is realized, and the measurement resolution reaches 0.19 nm.展开更多
To resolve the conflict of large measurement range and high accuracy in the existing real-time displacement measurement laser diode （LD） interferometers, a novel real-time displacement measurement LD interferometry ...To resolve the conflict of large measurement range and high accuracy in the existing real-time displacement measurement laser diode （LD） interferometers, a novel real-time displacement measurement LD interferometry is proposed and its measurement principle is analyzed. By use of a new phase demodulation algorithm and a new phase compensation algorithm of real-time phase unwrapping, the measurement accuracy is improved, and the measurement range is enlarged to a few wavelengths. In experiments, the peak-to-peak amplitude of the speaker vibration was 2361.7 nm, and the repeatability was 2.56 nm. The measurement time was less than 26 us.展开更多
基金This work was supported by National Natural Science Foundation of China (No. 60578051)International Cooperation Program of Shanghai Municipal Science & Technology Commission (No. 051107085).
文摘A sinusoidal phase-modulating （SPM） laser diode （LD） interferometer for real-time surface profile measurement is proposed and its principle is analyzed. The phase signal of the surface profile is detected from the sinusoidal phase-modulating interference signal using a real-time phase detection circuit. For 60 × 60 measurement points of the surface profile, the measuring time is 10 ms. A root mean square （RMS） measurement repeatability of 3.93 nm is realized, and the measurement resolution reaches 0.19 nm.
基金This work was supported by the National Natural Science Foundation of China (No.60578051)the Science and Technology Committee of Shanghai (No.051107085 and 06QB14047).
文摘To resolve the conflict of large measurement range and high accuracy in the existing real-time displacement measurement laser diode （LD） interferometers, a novel real-time displacement measurement LD interferometry is proposed and its measurement principle is analyzed. By use of a new phase demodulation algorithm and a new phase compensation algorithm of real-time phase unwrapping, the measurement accuracy is improved, and the measurement range is enlarged to a few wavelengths. In experiments, the peak-to-peak amplitude of the speaker vibration was 2361.7 nm, and the repeatability was 2.56 nm. The measurement time was less than 26 us.
