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Insulator Surface Charge Measurement Using an Improved Capacitive Probe
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作者 汪沨 邱毓昌 +2 位作者 李欣然 PFEIFFER W KUFFEL E 《Plasma Science and Technology》 SCIE EI CAS CSCD 2006年第5期565-568,共4页
A surface charge measuring system using the capacitive probe method is analysed. The present study shows that the measuring system cannot have a steady-state output and that the error resulting from the finite leakage... A surface charge measuring system using the capacitive probe method is analysed. The present study shows that the measuring system cannot have a steady-state output and that the error resulting from the finite leakage resistance of the measuring system will be accumulated during the measuring process. Based on the theoretical analysis a new type probe with a low charge leakage and high resolution is designed. The surface charge accumulated on the Teflon insulator under a DC voltage is measured using this new probe and some phenomena of the surface charging are reported. 展开更多
关键词 surface charge insulator capacitive probe
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