The electron energy distribution functions(EEDFs)are studied in the planar-type surface-wave plasma(SWP)caused by resonant excitation of surface plasmon polaritons(SPPs)using a single cylindrical probe.Sustained plasm...The electron energy distribution functions(EEDFs)are studied in the planar-type surface-wave plasma(SWP)caused by resonant excitation of surface plasmon polaritons(SPPs)using a single cylindrical probe.Sustained plasma characteristics can be considered as a bi-Maxwellian EEDF,which correspond to a superposition of the bulk low-temperature electron and the high-energy electron beam-like part.The beam component energy is pronounced at about 10 eV but the bulk part is lower than 3.5 eV.The hot electrons included in the proposed plasmas play a significant role in plasma heating and further affect the discharge chemistry.展开更多
基金by the National Natural Science Foundation under Grant No 11105002the Doctoral Scientific Research Fund of Anhui University of Science and Technology(No 2010yb011)+1 种基金the Generations’Innovation Fund of Huazhong University of Science and Technology(No HF0601708131)the ITER Domestic Matching Item of China(No GB105003).
文摘The electron energy distribution functions(EEDFs)are studied in the planar-type surface-wave plasma(SWP)caused by resonant excitation of surface plasmon polaritons(SPPs)using a single cylindrical probe.Sustained plasma characteristics can be considered as a bi-Maxwellian EEDF,which correspond to a superposition of the bulk low-temperature electron and the high-energy electron beam-like part.The beam component energy is pronounced at about 10 eV but the bulk part is lower than 3.5 eV.The hot electrons included in the proposed plasmas play a significant role in plasma heating and further affect the discharge chemistry.
