Ultra-wide band-gap nitrides have huge potential in micro-and optoelectronics due to their tunable wide band-gap,high breakdown field and energy density,excellent chemical and thermal stability.However,their applicati...Ultra-wide band-gap nitrides have huge potential in micro-and optoelectronics due to their tunable wide band-gap,high breakdown field and energy density,excellent chemical and thermal stability.However,their application has been severely hindered by the low p-doping efficiency,which is ascribed to the ultrahigh acceptor activation energy originated from the low valance band maximum.Here,a valance band modulation mode is proposed and a quantum engineering doping method is conducted to achieve high-efficient p-type ultra-wide band-gap nitrides,in which GaN quantum-dots are buried in nitride matrix to produce a new band edge and thus to tune the dopant activation energy.By non-equilibrium doping techniques,quantum engineering doped AIGaN:Mg with Al content of 60%is successfully fabricated.The Mg activation energy has been reduced to about 21 meV,and the hole concentration reaches higher than 10^(18)cm^(-3)at room temperature.Also,similar activation energies are obtained in AIGaN with other Al contents such as 50%and 70%;indicating the universality of the quantum engineering doping method.Moreover,deep-ultraviolet light-emission diodes are fabricated and the improved performance further demonstrates the validity and merit of the method.With the quantum material growth techniques developing,this method would be prevalently available and tremendously stimulate the promotion of ultra-wide band-gap semiconductor-based devices.展开更多
基金the National Natural Science Foundation for Distinguished Young Scholars of China[61725403]National Natural Science Foundation of China[62004196,61922078,61827813,61834008,61922077]+1 种基金Youth Innovation Promotion Association of CAS[Y201945,2017154]Open Project of Suzhou Institute of Nano-Tech and Nano-Bionics,CAS[20YZ10].
文摘Ultra-wide band-gap nitrides have huge potential in micro-and optoelectronics due to their tunable wide band-gap,high breakdown field and energy density,excellent chemical and thermal stability.However,their application has been severely hindered by the low p-doping efficiency,which is ascribed to the ultrahigh acceptor activation energy originated from the low valance band maximum.Here,a valance band modulation mode is proposed and a quantum engineering doping method is conducted to achieve high-efficient p-type ultra-wide band-gap nitrides,in which GaN quantum-dots are buried in nitride matrix to produce a new band edge and thus to tune the dopant activation energy.By non-equilibrium doping techniques,quantum engineering doped AIGaN:Mg with Al content of 60%is successfully fabricated.The Mg activation energy has been reduced to about 21 meV,and the hole concentration reaches higher than 10^(18)cm^(-3)at room temperature.Also,similar activation energies are obtained in AIGaN with other Al contents such as 50%and 70%;indicating the universality of the quantum engineering doping method.Moreover,deep-ultraviolet light-emission diodes are fabricated and the improved performance further demonstrates the validity and merit of the method.With the quantum material growth techniques developing,this method would be prevalently available and tremendously stimulate the promotion of ultra-wide band-gap semiconductor-based devices.
