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Irradiation Defects in Silicon Crystal 被引量:1
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作者 WUCheng-long YANGDe-ren 《Semiconductor Photonics and Technology》 CAS 2003年第1期41-45,共5页
The application of irradiation in silicon crystal is introduced.The defects caused by irradiation are reviewed and some major ways of studying defects in irradiated silicon are summarized.Furthermore the problems in t... The application of irradiation in silicon crystal is introduced.The defects caused by irradiation are reviewed and some major ways of studying defects in irradiated silicon are summarized.Furthermore the problems in the investigation of irradiated silicon are discussed as well as its properties. 展开更多
关键词 silicon crystal DEFECT IRRADIATION
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