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Up-scaled Teer-UDP850/4 Unbalanced Magnetron Deposition System Used for Mass-Production of CrTiAIN Hard Coatings 被引量:4
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作者 ZHANGGuo-jun YANGShi-cai +4 位作者 JIANGBai-ling BAILi-jing CHENDi-chum WENXiao-bin TEERD.G. 《材料热处理学报》 EI CAS CSCD 北大核心 2004年第05B期827-831,共5页
Up-scaled deposition process of Teer-UDP850/4 has been established and used for massive production of CrTiAIN hard coatings in applications of anti-wear, cutting and forming tools. This deposition system uses four mag... Up-scaled deposition process of Teer-UDP850/4 has been established and used for massive production of CrTiAIN hard coatings in applications of anti-wear, cutting and forming tools. This deposition system uses four magnetrons that are arranged by unbalanced magnets to form closed magnetic field enabling the system running in high current density. Elemental metals of Cr, Ti and Al are used as the target materials which are co-deposited with nitrogen forming multialloy nitride, nanoscale multi-layer or superlattice hard coatings. The substrate turntable is desfgned as planet rotation mechanism with three folds so that components or tools with complicate geometry can be uniformly coated onto all their surfaces and cutting edges. The power units for the magnetrons are straight dc whilst the substrate is biased by pulsed dc. Two solid heaters are installed in the system to enable running a wide range of deposition temperature from 200°C to 500°C. The pumping system is powerful that incorporated with a polycold to pump the system to a good vacuum in a very short time. A front door and a movable substrate table are available to benefit easily loading and unloading. Deposition procedure, properties and performance of the coatings is also presented in this paper. 展开更多
关键词 不平衡磁控管溅射 CrTiAlN 硬质合金涂层 热处理
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Applications of Cr-Based Metal Nitride Hard Coatings Using Multi-Magnetron Sputtering Sources and Elemental Metal Targets 被引量:4
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作者 ShicaiYang EricWiemann D.C.Teer 《材料热处理学报》 EI CAS CSCD 北大核心 2004年第05B期821-826,共6页
Cr-based nitride hard coatings were produced by multi-magnetron sputtering sources using elemental metal materials. Cr, Ti, Mo, V, Al, and Y target materials were used for the metal sources whilst nitrogen was introdu... Cr-based nitride hard coatings were produced by multi-magnetron sputtering sources using elemental metal materials. Cr, Ti, Mo, V, Al, and Y target materials were used for the metal sources whilst nitrogen was introduced at the same time to produce multilayer nitride hard coatings. The deposition process was optimised according to the properties of hardness, adherence and wear measured using microhardness, scratch, Rockwell indentation and pin-on-disc tests. The coatings were deposited onto hard metal carbide as well as high speed steel cutting tools such as inserts and drills. The coated inserts were tested on a wide range of difficult to machine materials using a Boehringer VDF180-C CNC lathe. The machining was performed under interrupted cutting conditions and the results were compared with those obtained using an advanced commercially available TiAIN coating. The coated carbide drills were tested under dry conditions to cut hard alloy steel and the coated tool steel drills were tested under lubricant conditions to cut carbon steel with comparing the similar tests on commercial TiN coatings. These test results were compared with those from drills coated with a commercial TiN. 展开更多
关键词 切割 钻孔 磁控管溅射 渗氮 CR合金
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The Properties and Applications of MoS_2/Ti Composite Coatings in Dry Cutting and Forming 被引量:1
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作者 XiaolingZhang HailinSun +2 位作者 D.Becker S.Wagner D.G.Teer 《材料热处理学报》 EI CAS CSCD 北大核心 2004年第05B期894-898,共5页
MoSi/Ti composite coatings (MoST?), have been deposited by a closed-field unbalanced magnetron sputter ion-plating system. The high ion-current densities at low substrate bias voltage of the system ensures that the Mo... MoSi/Ti composite coatings (MoST?), have been deposited by a closed-field unbalanced magnetron sputter ion-plating system. The high ion-current densities at low substrate bias voltage of the system ensures that the MoST? coatings are characteristic of dense coherent structures, with high adhesion (critical scratch load above 120 N), high load bearing capacity up to 5 GPa., low friction (0.02-0.1), high wear resistance (less than 4xlO"17 m3/N m) even at a relative humidity of 40%, and high temperature resistance up to 350 °C. The successful applications of MoST? coatings in large- scale productions for dry cutting and forming, with increasing lifetime and productivity are presented. 展开更多
关键词 MoS2/Ti复合涂层 干切割 低摩擦力 磁控管溅射
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The Study of Deposition Parameters, Properties for PVD Ti_xN and Cr_xN Coatings Using a Closed Field Unbalanced Magnetron Sputter Ion Plating System
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作者 HailinSun SusanField +1 位作者 JianChen Dennis.G.Teer 《材料热处理学报》 EI CAS CSCD 北大核心 2004年第05B期841-846,共6页
Closed Field Unbalanced Magnetron Sputter Ion Plating (CFUBMSIP) systems have been used increasingly for PVD coating in recent years. TiN and CrN coatings, commonly used as the basic coating for a number of different ... Closed Field Unbalanced Magnetron Sputter Ion Plating (CFUBMSIP) systems have been used increasingly for PVD coating in recent years. TiN and CrN coatings, commonly used as the basic coating for a number of different hard coatings, have been chosen to study the coating process parameters for the CFUBMSIP system. In this paper, the process parameters, such as substrate temperature, substrate bias and OEM control, have been carefully examined to achieve hard and wear-resistance coatings with good adhesion. The coating structure and orientation were found to change according to the coating parameters. The Rockwell test and Scratch test were carried out to examine the coating adhesion; pin-on-disc testing was used to estimate the wear-resistant; micro-hardness was also used to determine coating hardness. HSS drill testing has been carried out to study the general properties of the coating for cutting tool application. A combination of process parameters can be selected to achieve good performance for the TiN and CrN coatings. 展开更多
关键词 PVD 衬底温度 磁控管溅射 TixN涂层 CrxN涂层 OEM
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