Diamond thin films were produced by microwave plasma chemical vapor deposition.The deposit is identified by X-ray diffraction,Raman spectroscopy and Scanning electron microscopy.During the course of diamond growth,the...Diamond thin films were produced by microwave plasma chemical vapor deposition.The deposit is identified by X-ray diffraction,Raman spectroscopy and Scanning electron microscopy.During the course of diamond growth,the characteristics of the plasma have been measured by means of the Langmuir double probe and emission spectrometer.展开更多
文摘Diamond thin films were produced by microwave plasma chemical vapor deposition.The deposit is identified by X-ray diffraction,Raman spectroscopy and Scanning electron microscopy.During the course of diamond growth,the characteristics of the plasma have been measured by means of the Langmuir double probe and emission spectrometer.
