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Measurement of charge transfer potential barrier in pinned photodiode CMOS image sensors 被引量:1
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作者 曹琛 张冰 +1 位作者 王俊峰 吴龙胜 《Journal of Semiconductors》 EI CAS CSCD 2016年第5期56-60,共5页
The charge transfer potential barrier (CTPB) formed beneath the transfer gate causes a noticeable image lag issue in pinned photodiode (PPD) CMOS image sensors (CIS), and is difficult to measure straightforwardl... The charge transfer potential barrier (CTPB) formed beneath the transfer gate causes a noticeable image lag issue in pinned photodiode (PPD) CMOS image sensors (CIS), and is difficult to measure straightforwardly since it is embedded inside the device. From an understanding of the CTPB formation mechanism, we report on an alternative method to feasibly measure the CTPB height by performing a linear extrapolation coupled with a horizontal left-shift on the sensor photoresponse curve under the steady-state illumination. The theoretical study was pertbrmed in detail on the principle of the proposed method. Application of the measurements oil a prototype PPD-CIS chip with an array of 160 ×160 pixels is demonstrated. Such a method intends to shine new light oil the guidance for the lag-free and high-speed sensors optimization based on PPD devices. 展开更多
关键词 CMOS image sensors (C1S) pinned photodiode (PPD) charge transfer potential barrier (CTPB) photoresponse curve
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