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Contributions of holography to the advancement of interferometric measurements of surface topography 被引量:3
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作者 Peter J.de Groot Leslie L.Deck +1 位作者 Rong Su Wolfgang Osten 《Light(Advanced Manufacturing)》 2022年第2期80-99,共20页
Two major fields of study in optics—holography and interferometry—have developed at times independently and at other times together.The two methods share the principle of holistically recording as an intensity patte... Two major fields of study in optics—holography and interferometry—have developed at times independently and at other times together.The two methods share the principle of holistically recording as an intensity pattern the magnitude and phase distribution of a light wave,but they can differ significantly in how these recordings are formed and interpreted.Here we review seven specific developments,ranging from data acquisition to fundamental imaging theory in three dimensions,that illustrate the synergistic developments of holography and interferometry.A clear trend emerges,of increasing reliance of these two fields on a common trajectory of enhancements and improvements. 展开更多
关键词 HOLOGRAPHY TOPOGRAPHY INTERFEROMETRY METROLOGY
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