The unique properties and atomic thickness of two-dimensional(2D)materials enable smaller and better nanoelectromechanical sensors with novel functionalities.During the last decade,many studies have successfully shown...The unique properties and atomic thickness of two-dimensional(2D)materials enable smaller and better nanoelectromechanical sensors with novel functionalities.During the last decade,many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors,microphones,accelerometers,and mass and gas sensors.In this review,we explain the different sensing concepts and give an overview of the relevant material properties,fabrication routes,and device operation principles.Finally,we discuss sensor readout and integration methods and provide comparisons against the state of the art to show both the challenges and promises of 2D material-based nanoelectromechanical sensing.展开更多
基金This work was financially supported by the European Commission under the project Graphene Flagship(785219 and 881603)and ULISSES(825272)the German Ministry of Education and Research(BMBF)under the project GIMMIK(03XP0210)and NobleNEMS(16ES1121)+4 种基金the German Federal Ministry for Economic Affairs and Energy(BMWi)and the European Social Fund in Germany under the project AachenCarbon(03EFLNW199)the Swedish Research Foundation(VR)(2015-05112)the FLAG-ERA project CO2DETECT funded by Vinnova(2017-05108)the Dutch 4 TU Federation project High Tech for a Sustainable Future and the FLAG-ERA project 2DNEMS funded by the Swedish Research Foundation(VR)(2019-03412)the German Research Foundation(DFG)(LE 2441/11-1).
文摘The unique properties and atomic thickness of two-dimensional(2D)materials enable smaller and better nanoelectromechanical sensors with novel functionalities.During the last decade,many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors,microphones,accelerometers,and mass and gas sensors.In this review,we explain the different sensing concepts and give an overview of the relevant material properties,fabrication routes,and device operation principles.Finally,we discuss sensor readout and integration methods and provide comparisons against the state of the art to show both the challenges and promises of 2D material-based nanoelectromechanical sensing.
